Si(100) surface morphology evolution during normal-incidence sputtering with 100–500 eV Ar+ ions
Keyword(s):
2017 ◽
Vol 409
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pp. 158-162
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2016 ◽
Vol 478
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pp. 287-294
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Keyword(s):
Keyword(s):
2003 ◽
Vol 219
(1-2)
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pp. 93-101
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