Thickness determination of very thin SiO2 films on Si by electron-induced x-ray emission spectroscopy
2006 ◽
Vol 252
(6)
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pp. 2375-2388
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2018 ◽
Vol 90
(11)
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pp. 6587-6593
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1999 ◽
Vol 38
(Part 1, No. 7A)
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pp. 4172-4179
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2014 ◽
Vol 46
(10-11)
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pp. 911-914
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