scholarly journals Reflection high-energy electron diffraction analysis of polycrystalline films with grain size and orientation distributions

2002 ◽  
Vol 92 (9) ◽  
pp. 5133-5139 ◽  
Author(s):  
J. W. Hartman ◽  
R. T. Brewer ◽  
Harry A. Atwater
Keyword(s):  
Grain Size ◽  
Electron Diffraction ◽  
Diffraction Analysis ◽  
High Energy ◽  
Energy Electron ◽  
Electron Diffraction Analysis ◽  
High Energy Electron ◽  
Polycrystalline Films ◽  
Orientation Distributions ◽  
Grain Size And Orientation

RHEED Study of the Texture in Polycrystalline Films of Magnetite Grown on Oxidized Silicon Surface

2016 ◽  
Vol 247 ◽  
pp. 118-123
Author(s):  
Vyacheslav V. Balashev ◽  
Victor A. Vikulov ◽  
Tatiana A. Pisarenko ◽  
Vladimir V. Korobtsov
Keyword(s):  
Electron Diffraction ◽  
Oxygen Pressure ◽  
Silicon Surface ◽  
Film Growth ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Polycrystalline Films ◽  
Reactive Deposition ◽  
Lower Oxygen

Polycrystalline films of magnetite (Fe3O4) with thickness of 75 nm were grown on SiO2/Si (001) surface by reactive deposition of Fe in O2 atmosphere. The growth of Fe3O4 films was conducted with the different oxygen pressures. The structure of films was monitored by reflection high-energy electron diffraction (RHEED) during the film growth. It was found that there is a range of oxygen pressure in which the growth of only textured Fe3O4 film takes place. Reactive deposition of Fe at lower oxygen pressure results in a growth of Fe3O4 film without a texture. In contrast at the deposition with higher oxygen pressure the texture in the Fe3O4 film remains but the appearance of hematite (α-Fe2O3) is observed.

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