Neutral gas temperature estimate in CF4/O2/Ar inductively coupled plasmas

2002 ◽  
Vol 81 (6) ◽  
pp. 990-992 ◽  
Author(s):  
Brett A. Cruden ◽  
M. V. V. S. Rao ◽  
Surendra P. Sharma ◽  
M. Meyyappan
Keyword(s):  
Gas Temperature ◽  
Inductively Coupled Plasmas ◽  
Temperature Estimate ◽  
Inductively Coupled ◽  
Neutral Gas ◽  
Coupled Plasmas

Measurement of neutral gas temperature in inductively coupled plasmas

2011 ◽  
Vol 166 (6) ◽  
pp. 399-407 ◽  
Author(s):  
H. Li ◽  
C. Xiao ◽  
E. Zhang ◽  
A. K. Singh ◽  
A. Hirose
Keyword(s):  
Gas Temperature ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Neutral Gas ◽  
Coupled Plasmas

Gas temperature measurement in CF4, SF6, O2, Cl2, and HBr inductively coupled plasmas

2009 ◽  
Vol 27 (3) ◽  
pp. 471-478 ◽  
Author(s):  
G. Cunge ◽  
R. Ramos ◽  
D. Vempaire ◽  
M. Touzeau ◽  
M. Neijbauer ◽  
...  
Keyword(s):  
Temperature Measurement ◽  
Gas Temperature ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

2020 ◽  
Vol 128 (8) ◽  
pp. 089901
Author(s):  
Chenhui Qu ◽  
Steven J. Lanham ◽  
Steven C. Shannon ◽  
Sang Ki Nam ◽  
Mark J. Kushner
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Power Matching ◽  
Coupled Plasmas

Etching characteristics of ZnO thin films in chlorine-containing inductively coupled plasmas

2006 ◽  
Vol 83 (2) ◽  
pp. 328-335 ◽  
Author(s):  
S.W. Na ◽  
M.H. Shin ◽  
Y.M. Chung ◽  
J.G. Han ◽  
S.H. Jeung ◽  
...  
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

2003 ◽  
Vol 10 (4) ◽  
pp. 1146-1151 ◽  
Author(s):  
K. Ostrikov ◽  
E. Tsakadze ◽  
S. Xu ◽  
S. V. Vladimirov ◽  
R. Storer
Keyword(s):  
Electromagnetic Fields ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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