Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation

2002 ◽  
Vol 92 (5) ◽  
pp. 2602-2609 ◽  
Author(s):  
H. Mäckel ◽  
R. Lüdemann
Keyword(s):  
Silicon Surface ◽  
Surface Passivation ◽  
High Quality ◽  
Silicon Surface Passivation

scholarly journals High quality crystalline silicon surface passivation by combined intrinsic and n-type hydrogenated amorphous silicon

2011 ◽  
Vol 99 (20) ◽  
pp. 203503 ◽  
Author(s):  
Jan-Willem A. Schüttauf ◽  
Karine H. M. van der Werf ◽  
Inge M. Kielen ◽  
Wilfried G. J. H. M. van Sark ◽  
Jatindra K. Rath ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
High Quality ◽  
Hydrogenated Amorphous ◽  
Silicon Surface Passivation

scholarly journals Improved Silicon Surface Passivation of APCVD Al2O3 by Rapid Thermal Annealing

2016 ◽  
Vol 92 ◽  
pp. 317-325 ◽  
Author(s):  
Lachlan E. Black ◽  
Thomas Allen ◽  
Keith R. McIntosh ◽  
Andres Cuévas
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Silicon Surface Passivation

Silicon surface passivation using thin HfO2 films by atomic layer deposition

2015 ◽  
Vol 357 ◽  
pp. 635-642 ◽  
Author(s):  
Jhuma Gope ◽  
Vandana ◽  
Neha Batra ◽  
Jagannath Panigrahi ◽  
Rajbir Singh ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silicon Surface Passivation

scholarly journals Silicon Surface Passivation by Al2O3: Effect of ALD Reactants

2011 ◽  
Vol 8 ◽  
pp. 681-687 ◽  
Author(s):  
Päivikki Repo ◽  
Heli Talvitie ◽  
Shuo Li ◽  
Jarmo Skarp ◽  
Hele Savin
Keyword(s):  
Silicon Surface ◽  
Surface Passivation ◽  
Silicon Surface Passivation
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