Electron spin resonance study of interface defects in atomic layer deposited hafnium oxide on Si

2002 ◽  
Vol 81 (6) ◽  
pp. 1128-1130 ◽  
Author(s):  
A. Y. Kang ◽  
P. M. Lenahan ◽  
J. F. Conley ◽  
R. Solanki
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