Detection of hydrogen atoms in SiH4–H2 radio-frequency plasmas using two-photon laser-induced fluorescence
1992 ◽
Vol 31
(Part 1, No. 9A)
◽
pp. 2917-2918
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1996 ◽
Vol 14
(1)
◽
pp. 125-131
◽
1997 ◽
Vol 15
(1)
◽
pp. 149-153
◽
1992 ◽
Vol 10
(4)
◽
pp. 1071-1079
◽
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