Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method

2002 ◽  
Vol 91 (12) ◽  
pp. 9772 ◽  
Author(s):  
Tsuneyuki Yamane ◽  
Naoto Nagai ◽  
Shin-ichiro Katayama ◽  
Minoru Todoki
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Silicon Dioxide ◽  
3Ω Method

Long-term Room Temperature Instability in Thermal Conductivity of InGaZnO Thin Films

MRS Advances ◽  
2016 ◽  
Vol 1 (22) ◽  
pp. 1631-1636 ◽  
Author(s):  
Boya Cui ◽  
D. Bruce Buchholz ◽  
Li Zeng ◽  
Michael Bedzyk ◽  
Robert P. H. Chang ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Room Temperature ◽  
Storage Time ◽  
Laser Deposition ◽  
Low Oxygen ◽  
X Ray Diffraction ◽  
3Ω Method ◽  
X Ray

ABSTRACTThe cross-plane thermal conductivities of InGaZnO (IGZO) thin films in different morphologies were measured on three occasions within 19 months, using the 3ω method at room temperature 300 K. Amorphous (a-), semi-crystalline (semi-c-) and crystalline (c-) IGZO films were grown by pulsed laser deposition (PLD), followed by X-ray diffraction (XRD) for evaluation of film quality and crystallinity. Semi-c-IGZO shows the highest thermal conductivity, even higher than the most ordered crystal-like phase. After being stored in dry low-oxygen environment for months, a drastic decrease of semi-c-IGZO thermal conductivity was observed, while the thermal conductivity slightly reduced in c-IGZO and remained unchanged in a-IGZO. This change in thermal conductivity with storage time can be attributed to film structural relaxation and vacancy diffusion to grain boundaries.

Thermal conductivity of Gd 2 Zr 2 O 7 thin films at various temperatures by using the 3ω method

2017 ◽  
Vol 641 ◽  
pp. 34-37 ◽  
Author(s):  
Ji Hye Kwak ◽  
Jun Gu Kang ◽  
Ho-Soon Yang ◽  
Euh Duck Jeong ◽  
Hyun Gyu Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
3Ω Method

Thermal conductivity of thin films of gallium nitride, doped with aluminium, measured with 3ω method

2020 ◽  
Vol 101 ◽  
pp. 106105 ◽  
Author(s):  
Alexandra Filatova-Zalewska ◽  
Zenon Litwicki ◽  
Tadeusz Suski ◽  
Andrzej Jeżowski
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Gallium Nitride ◽  
3Ω Method ◽  
Conductivity Of Thin Films

Differential 3ω method for measuring thermal conductivity of AlN and Si3N4 thin films

2015 ◽  
Vol 591 ◽  
pp. 267-270 ◽  
Author(s):  
Manuel Bogner ◽  
Alexander Hofer ◽  
Günther Benstetter ◽  
Hermann Gruber ◽  
Richard Y.Q. Fu
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
3Ω Method

Fluence Dependence of Thermoelectric Properties Induced By Ion Bombardment of Zn4Sb3 and CeFe2Co2Sb12 thin films

2007 ◽  
Vol 1020 ◽  
Author(s):  
C.C. Smith ◽  
S. Budak ◽  
S. Guner ◽  
C. Muntele ◽  
R. A. Minamisawa ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Power Generation ◽  
Silicon Dioxide ◽  
Figure Of Merit ◽  
Rutherford Backscattering Spectrometry ◽  
Ion Bombardment ◽  
Constant Energy ◽  
Electrical Devices ◽  
Fluence Dependence

AbstractThermoelectric power generation is a promising technology for increasing the efficiency of electrical and optical electrical devices. We prepared samples by Electron Beam evaporating Zn4Sb3 and CeFe2Co2Sb12 thin films on silicon dioxide (silica) substrates. The materials were co-evaporated and then were prepared for gold over-coating. Following electron deposition we performed post ion bombardment at a constant energy of 5 MeV while varying fluence from 1×1012, 1×1013, 1×1014, 1×1015 ions/cm2, respectfully. The production of nano-clusters generated from the MeV Si ions bombardment modifies the electrical and phonon interactions in the materials. Also, we will report on the fluence dependence of the figure of merit, Seebeck Coefficient, thermal conductivity and electrical conductivity. In addition, Rutherford backscattering spectrometry (RBS) was used to analyze the elemental composition and the thickness of the deposited material.

Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films

2006 ◽  
Vol 15 (2-3) ◽  
pp. 389-393 ◽  
Author(s):  
Syed Ahmed ◽  
Romy Liske ◽  
Thomas Wunderer ◽  
Michael Leonhardt ◽  
Ronny Ziervogel ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Conductivity Measurements ◽  
3Ω Method ◽  
Diamond Thin Films

Extending the 3ω method: Thermal conductivity characterization of thin films

2013 ◽  
Vol 84 (8) ◽  
pp. 084904 ◽  
Author(s):  
Nico Bodenschatz ◽  
André Liemert ◽  
Sebastian Schnurr ◽  
Ulf Wiedwald ◽  
Paul Ziemann
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
3Ω Method
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