Parallel inhomogeneous flows in a thermally anisotropic plasma: The electrostatic ion-acoustic branch

2002 ◽  
Vol 9 (6) ◽  
pp. 2526-2533 ◽  
Author(s):  
Robert S. Spangler ◽  
Earl E. Scime ◽  
Gurudas I. Ganguli
Keyword(s):  
Anisotropic Plasma ◽  
Acoustic Branch ◽  
Ion Acoustic

Electrostatic oscillations due to filamentary structures in the magnetic-field-aligned flow: The ion-acoustic branch

1999 ◽  
Vol 104 (A6) ◽  
pp. 12683-12693 ◽  
Author(s):  
Valeriy V. Gavrishchaka ◽  
Supriya B. Ganguli ◽  
Gurudas I. Ganguli
Keyword(s):  
Magnetic Field ◽  
Acoustic Branch ◽  
Ion Acoustic ◽  
The Magnetic Field

Anisotropic Plasma ChemicalVapor Deposition of Copper Films in Trenches

2003 ◽  
Vol 766 ◽  
Author(s):  
Kosuke Takenaka ◽  
Masao Onishi ◽  
Manabu Takenshita ◽  
Toshio Kinoshita ◽  
Kazunori Koga ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Deposition Rate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Anisotropic Plasma ◽  
Bottom Surface ◽  
Chemical Vapor Deposition Method ◽  
Copper Films ◽  
Deposition Method ◽  
Via Holes

AbstractAn ion-assisted chemical vapor deposition method by which Cu is deposited preferentially from the bottom of trenches (anisotropic CVD) has been proposed in order to fill small via holes and trenches. By using Ar + H2 + C2H5OH[Cu(hfac)2] discharges with a ratio H2 / (H2 + Ar) = 83%, Cu is filled preferentially from the bottom of trenches without deposition on the sidewall and top surfaces. The deposition rate on the bottom surface of trenches is experimentally found to increase with decreasing its width.

Ion Acoustic Microscopy

1985 ◽  
Author(s):  
Keith O. Legg ◽  
Douglas N. Rose
Keyword(s):  
Acoustic Microscopy ◽  
Ion Acoustic

Solitary waves in a dusty adiabatic electronegative plasma

2010 ◽  
Vol 76 (3-4) ◽  
pp. 409-418 ◽  
Author(s):  
A. A. MAMUN ◽  
K. S. ASHRAFI ◽  
M. G. M. ANOWAR
Keyword(s):  
Solitary Waves ◽  
Vries Equation ◽  
Negative Ions ◽  
Finite Amplitude ◽  
Reductive Perturbation Method ◽  
Charged Dust ◽  
Electronegative Plasma ◽  
Ion Acoustic ◽  
Basic Features ◽  
Electronegative Plasmas

AbstractThe dust ion-acoustic solitary waves (SWs) in an unmagnetized dusty adiabatic electronegative plasma containing inertialess adiabatic electrons, inertial single charged adiabatic positive and negative ions, and stationary arbitrarily (positively and negatively) charged dust have been theoretically studied. The reductive perturbation method has been employed to derive the Korteweg-de Vries equation which admits an SW solution. The combined effects of the adiabaticity of plasma particles, inertia of positive or negative ions, and presence of positively or negatively charged dust, which are found to significantly modify the basic features of small but finite-amplitude dust-ion-acoustic SWs, are explicitly examined. The implications of our results in space and laboratory dusty electronegative plasmas are briefly discussed.

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