Laser beam induced currents in polycrystalline silicon thin films prepared by interference laser crystallization

2002 ◽  
Vol 91 (7) ◽  
pp. 4220-4228 ◽  
Author(s):  
B. Rezek ◽  
C. E. Nebel ◽  
M. Stutzmann
Keyword(s):  
Thin Films ◽  
Laser Beam ◽  
Polycrystalline Silicon ◽  
Laser Crystallization ◽  
Silicon Thin Films ◽  
Induced Currents

Fabrication of polycrystalline silicon thin films on glass substrates using fiber laser crystallization

2009 ◽  
Vol 517 (14) ◽  
pp. 3971-3974 ◽  
Author(s):  
Vinh Ai Dao ◽  
Kuymin Han ◽  
Jongkyu Heo ◽  
Dohyeon Kyeong ◽  
Jaehong Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Fiber Laser ◽  
Polycrystalline Silicon ◽  
Laser Crystallization ◽  
Glass Substrates ◽  
Silicon Thin Films

Polycrystalline Silicon Thin Films Produced by Interference Laser Crystallization of Amorphous Silicon

1999 ◽  
Vol 38 (Part 2, No. 10A) ◽  
pp. L1083-L1084 ◽  
Author(s):  
Bohuslav Rezek ◽  
Christoph E. Nebel ◽  
Martin Stutzmann
Keyword(s):  
Thin Films ◽  
Amorphous Silicon ◽  
Polycrystalline Silicon ◽  
Laser Crystallization ◽  
Silicon Thin Films

In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

2013 ◽  
Vol 210 (12) ◽  
pp. 2729-2735 ◽  
Author(s):  
Ingmar Höger ◽  
Thomas Schmidt ◽  
Anja Landgraf ◽  
Martin Schade ◽  
Annett Gawlik ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Silicon Thin Films ◽  
Excimer Laser Irradiation

Heat Treatment of Amorphous and Polycrystalline Silicon Thin Films with High-Pressure H2O Vapor

1998 ◽  
Vol 37 (Part 1, No. 8) ◽  
pp. 4254-4257 ◽  
Author(s):  
Toshiyuki Sameshima ◽  
Mitsuru Satoh ◽  
Keiji Sakamoto ◽  
Kentaro Ozaki ◽  
Keiko Saitoh
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
High Pressure ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films
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