Correlation of charge transport to local atomic strain in Si-rich silicon nitride thin films

2002 ◽  
Vol 80 (2) ◽  
pp. 261-263 ◽  
Author(s):  
S. Habermehl ◽  
C. Carmignani
2001 ◽  
Vol 687 ◽  
Author(s):  
S. Habermehl ◽  
C. Carmignani

AbstractField dependent bulk charge transport in Si-rich, low stress silicon nitride thin films is studied in correlation to the local atomic Si-N bond strain. Across a range of film compositions varying from fully stoichiometric Si3N4 to Si-rich SiN0.54, Poole-Frenkel emission is determined to be the dominant charge transport mechanism with the Poole- Frenkel barrier height found to decrease concomitantly from 1.10 to 0.52 eV. Across the same composition range the local residual Si-N bond strain, as measured by FTIR spectroscopy, is observed to vary from 0.006 to –0.0026. Comparison of the barrier height to the residual strain reveals a direct correlation between the two quantities. It is concluded that reductions in the Poole-Frenkel barrier height are a manifestation of compositionally induced strain relief at the molecular level. Reductions in the barrier height result in increased Poole-Frenkel emission detrapping rates and consequently higher leakage currents in Si-rich films.


1998 ◽  
Vol 546 ◽  
Author(s):  
V. Ziebartl ◽  
O. Paul ◽  
H. Baltes

AbstractWe report a new method to measure the temperature-dependent coefficient of thermal expansion α(T) of thin films. The method exploits the temperature dependent buckling of clamped square plates. This buckling was investigated numerically using an energy minimization method and finite element simulations. Both approaches show excellent agreement even far away from simple critical buckling. The numerical results were used to extract Cα(T) = α0+α1(T−T0 ) of PECVD silicon nitride between 20° and 140°C with α0 = (1.803±0.006)×10−6°C−1, α1 = (7.5±0.5)×10−9 °C−2, and T0 = 25°C.


2010 ◽  
Vol 518 (14) ◽  
pp. 3891-3893 ◽  
Author(s):  
J.C. Alonso ◽  
F.A. Pulgarín ◽  
B.M. Monroy ◽  
A. Benami ◽  
M. Bizarro ◽  
...  

2007 ◽  
Vol 76 (19) ◽  
Author(s):  
M. Sims ◽  
S. M. Tuladhar ◽  
J. Nelson ◽  
R. C. Maher ◽  
M. Campoy-Quiles ◽  
...  
Keyword(s):  

RSC Advances ◽  
2017 ◽  
Vol 7 (86) ◽  
pp. 54911-54919 ◽  
Author(s):  
Varsha Rani ◽  
Akanksha Sharma ◽  
Pramod Kumar ◽  
Budhi Singh ◽  
Subhasis Ghosh

We investigate the charge transport mechanism in copper phthalocyanine thin films with and without traps. We find that the density of interface states at the grain boundaries can decide the mechanism of charge transport in organic thin films.


2001 ◽  
Vol 388 (1-2) ◽  
pp. 171-176 ◽  
Author(s):  
R. Valaski ◽  
S. Ayoub ◽  
L. Micaroni ◽  
I.A. Hümmelgen

2009 ◽  
Vol 21 (16) ◽  
pp. NA-NA
Author(s):  
Leslie H. Jimison ◽  
Michael F. Toney ◽  
Iain McCulloch ◽  
Martin Heeney ◽  
Alberto Salleo

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