Monte Carlo simulation of ions inside a cylindrical bore for plasma source ion implantation

Chengsen Liu; Dezhen Wang

doi:10.1063/1.1421239

Monte Carlo simulation of ions inside a cylindrical bore for plasma source ion implantation

Journal of Applied Physics ◽

10.1063/1.1421239 ◽

2002 ◽

Vol 91 (1) ◽

pp. 32 ◽

Cited By ~ 5

Author(s):

Chengsen Liu ◽

Dezhen Wang

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Plasma Source ◽

Plasma Source Ion Implantation ◽

Cylindrical Bore

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A Monte Carlo simulation model for plasma source ion implantation

Journal of Applied Physics ◽

10.1063/1.352851 ◽

1993 ◽

Vol 73 (9) ◽

pp. 4171-4175 ◽

Cited By ~ 20

Author(s):

Dezhen Wang ◽

Tengcai Ma ◽

Ye Gong

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Simulation Model ◽

Plasma Source ◽

Plasma Source Ion Implantation ◽

Monte Carlo Simulation Model

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Plasma source ion implantation near the end of a cylindrical bore using an auxiliary electrode for finite rise time voltage pulses

Acta Physica Sinica ◽

10.7498/aps.52.109 ◽

2003 ◽

Vol 52 (1) ◽

pp. 109

Author(s):

Liu Cheng Sen ◽

Wang De Zhen

Keyword(s):

Ion Implantation ◽

Rise Time ◽

Plasma Source ◽

Auxiliary Electrode ◽

Plasma Source Ion Implantation ◽

Cylindrical Bore ◽

Voltage Pulses

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Pulsed Ion Sheath Dynamics in a Cylindrical Bore for Inner Surface Grid-Enhanced Plasma Source Ion Implantation

Chinese Physics Letters ◽

10.1088/0256-307x/19/10/323 ◽

2002 ◽

Vol 19 (10) ◽

pp. 1473-1475 ◽

Cited By ~ 7

Author(s):

Wang Jiu-Li ◽

Zhang Gu-Ling ◽

Fan Song-Hua ◽

Yang Wu-Bao ◽

Yang Si-Ze

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Inner Surface ◽

Plasma Source Ion Implantation ◽

Cylindrical Bore

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Recent results in plasma source ion implantation

10.2514/6.1992-3014 ◽

1992 ◽

Author(s):

JOHN CONRAD ◽

M. ABUZRIBA ◽

J. BLANCHARD ◽

D. CHAPEK ◽

A. CHEN ◽

...

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Plasma Source Ion Implantation

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Monte Carlo simulation of ion implantation (3-dimensional) and defect modeling during implantation process

International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) ◽

10.1109/iedm.2001.979647 ◽

2002 ◽

Author(s):

D. Li ◽

L. Lin ◽

G. Wang ◽

Y. Chen ◽

G. Shrivastav ◽

...

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Defect Modeling ◽

3 Dimensional ◽

Implantation Process

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Boron doping of silicon by plasma source ion implantation

Surface and Coatings Technology ◽

10.1016/s0257-8972(97)00054-6 ◽

1997 ◽

Vol 93 (2-3) ◽

pp. 247-253 ◽

Cited By ~ 9

Author(s):

R.J. Matyi ◽

D.L. Chapek ◽

D.P. Brunco ◽

S.B. Felch ◽

B.S. Lee

Keyword(s):

Ion Implantation ◽

Boron Doping ◽

Plasma Source ◽

Plasma Source Ion Implantation

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Particle-In-Cell/Monte-Carlo Simulation of Plasma and Neutral Gas Flow for the Inner Coating of PET Bottles by Plasma-Based Ion Implantation. N2 Gas Plasma

Plasma Processes and Polymers ◽

10.1002/ppap.200500008 ◽

2005 ◽

Vol 2 (6) ◽

pp. 480-484 ◽

Cited By ~ 5

Author(s):

Yoshiko Miyagawa ◽

Masaaki Tanaka ◽

Hiroshi Nakadate ◽

Masami Ikeyama ◽

Soji Miyagawa

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Gas Flow ◽

Particle In Cell ◽

Pet Bottles ◽

Neutral Gas ◽

Gas Plasma

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A model of plasma source ion implantation for inner surface modification

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/29/1/042 ◽

1996 ◽

Vol 29 (1) ◽

pp. 274-276 ◽

Cited By ~ 13

Author(s):

Mu Sun ◽

P Zhu ◽

S Z Yang

Keyword(s):

Surface Modification ◽

Ion Implantation ◽

Plasma Source ◽

Inner Surface ◽

Plasma Source Ion Implantation

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Deposition of Diamond-Like Carbon Films on Inner Wall Surfaces of Millimeter-Size-Diameter Steel Tubes by Plasma Source Ion Implantation

IEEE Transactions on Plasma Science ◽

10.1109/tps.2011.2168829 ◽

2011 ◽

Vol 39 (11) ◽

pp. 3140-3143 ◽

Cited By ~ 10

Author(s):

K. Baba ◽

R. Hatada ◽

S. Flege ◽

W. Ensinger

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Diamond Like Carbon ◽

Steel Tubes ◽

Plasma Source Ion Implantation

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Thyratron modulators in plasma source ion implantation

Digest of Technical Papers. Tenth IEEE International Pulsed Power Conference ◽

10.1109/ppc.1995.599786 ◽

2002 ◽

Cited By ~ 12

Author(s):

R.J. Adler ◽

J. Scheuer ◽

W. Horne

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Plasma Source Ion Implantation

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