Structural, electrical, and optical properties of low-doped 4H–SiC chemical vapor deposited epitaxial layers

2001 ◽  
Vol 90 (10) ◽  
pp. 5402-5409 ◽  
Author(s):  
E. Kalinina ◽  
G. Kholujanov ◽  
A. Zubrilov ◽  
V. Solov’ev ◽  
D. Davydov ◽  
...  
Keyword(s):  
Optical Properties ◽  
Chemical Vapor ◽  
Epitaxial Layers ◽  
Electrical And Optical Properties ◽  
Chemical Vapor Deposited

Investigation of the effect of hydrogen on electrical and optical properties in chemical vapor deposited on homoepitaxial diamond films

1997 ◽  
Vol 81 (2) ◽  
pp. 744-753 ◽  
Author(s):  
Kazushi Hayashi ◽  
Sadanori Yamanaka ◽  
Hideyuki Watanabe ◽  
Takashi Sekiguchi ◽  
Hideyo Okushi ◽  
...  
Keyword(s):  
Optical Properties ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Electrical And Optical Properties ◽  
Chemical Vapor Deposited

Atomic Structure and Optical Properties of Plasma Enhanced Chemical Vapor Deposited SiCOH Low-k Dielectric Film

2021 ◽  
Author(s):  
V. N. Kruchinin ◽  
V. A. Volodin ◽  
S. V. Rykhlitskii ◽  
V. A. Gritsenko ◽  
I. P. Posvirin ◽  
...  
Keyword(s):  
Optical Properties ◽  
Atomic Structure ◽  
Dielectric Film ◽  
Chemical Vapor ◽  
Chemical Vapor Deposited ◽  
Low K
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