On-line monitoring of perfluoro compounds in exhaust gases during semiconductor manufacture: Use of Li+ ion attachment mass spectrometry

2001 ◽  
Vol 90 (5) ◽  
pp. 2180-2184 ◽  
Author(s):  
Toshihiro Fujii ◽  
Megumi Nakamura
Keyword(s):  
Mass Spectrometry ◽  
Exhaust Gases ◽  
On Line ◽  
Ion Attachment ◽  
Li Ion

Mass Spectrometry for On-Line Monitoring of Perfluoro Compounds Using Li+Ion Attachment Techniques

2001 ◽  
Vol 73 (13) ◽  
pp. 2937-2940 ◽  
Author(s):  
Toshihiro Fujii ◽  
Sundaram Arulmozhiraja ◽  
Megumi Nakamura ◽  
Yoshiro Shiokawa
Keyword(s):  
Mass Spectrometry ◽  
On Line ◽  
Ion Attachment ◽  
Li Ion

Temperature-resolved thermal analysis of cisplatin by means of Li+ ion attachment mass spectrometry

2010 ◽  
Vol 12 (15) ◽  
pp. 3910 ◽  
Author(s):  
Seiji Takahashi ◽  
Yuki Kitahara ◽  
Megumi Nakamura ◽  
Yoshiro Shiokawa ◽  
Toshihiro Fujii
Keyword(s):  
Mass Spectrometry ◽  
Thermal Analysis ◽  
Ion Attachment ◽  
Li Ion

Evolved Gas Analysis of Ti(C5H5)2Cl2 by Means of Li+ Ion Attachment Mass Spectrometry

2012 ◽  
Vol 116 (2) ◽  
pp. 865-869 ◽  
Author(s):  
Seiji Takahashi ◽  
Takuya Suga ◽  
Yuki Kitahara ◽  
Toshihiro Fujii
Keyword(s):  
Mass Spectrometry ◽  
Evolved Gas Analysis ◽  
Gas Analysis ◽  
Evolved Gas ◽  
Ion Attachment ◽  
Li Ion

Detection of Cu(hfac)(tmvs) by Li+ ion attachment mass spectrometry

2006 ◽  
Vol 425 (1-3) ◽  
pp. 134-137 ◽  
Author(s):  
Toshihiro Fujii ◽  
Sundaram Arulmozhiraja ◽  
Megumi Nakamura ◽  
Yoshiro Shiokawa
Keyword(s):  
Mass Spectrometry ◽  
Ion Attachment ◽  
Li Ion

Anodic Oxidation of Conductive Carbon and Ethylene Carbonate in High-Voltage Li-Ion Batteries Quantified by On-Line Electrochemical Mass Spectrometry

2015 ◽  
Vol 162 (7) ◽  
pp. A1123-A1134 ◽  
Author(s):  
Michael Metzger ◽  
Cyril Marino ◽  
Johannes Sicklinger ◽  
Dominik Haering ◽  
Hubert A. Gasteiger
Keyword(s):  
Mass Spectrometry ◽  
Anodic Oxidation ◽  
High Voltage ◽  
Ethylene Carbonate ◽  
Li Ion Batteries ◽  
On Line ◽  
Li Ion
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