Atomic-scale defect control on hydrogen-terminated silicon surface at wafer scale
Keyword(s):
1994 ◽
Vol 33
(Part 2, No. 2A)
◽
pp. L190-L193
◽
Keyword(s):
2017 ◽
Vol 29
(11)
◽
pp. 4700-4707
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):