Electron beam lithography of Fresnel zone plates using a rectilinear machine and trilayer resists

Author(s):  
D. Tennant
1998 ◽  
Vol 5 (3) ◽  
pp. 791-793
Author(s):  
Takeo Watanabe ◽  
Tomohiro Okada ◽  
Hiroo Kinoshita

High-resolution X-ray microscopy requires advanced fabrication technology for Fresnel zone plates (FZPs). As the resolution of an FZP depends on the width of the outermost zone, fine zone patterns for objective lenses have to be replicated. On the other hand, to achieve highly condensed X-ray beams by using FZPs for condenser lenses, large-field replication is required. A method of pattern replication of FZPs for X-ray microscopy is reported. Utilizing a 30 keV electron-beam writing tool and an FZP-generation computer program, FZP patterns for a condenser lens 1 mm in diameter with an outermost-zone width of 0.2 µm and for an objective lens 0.5 mm in diameter with an outermost-zone width of 0.1 µm were replicated.


1987 ◽  
Vol 6 (1-4) ◽  
pp. 565-570 ◽  
Author(s):  
P. Unger ◽  
V. Bögli ◽  
H. Beneking ◽  
B. Niemann ◽  
P. Guttmann

Sensors ◽  
2021 ◽  
Vol 21 (15) ◽  
pp. 5066
Author(s):  
José Miguel Fuster ◽  
Sergio Pérez-López ◽  
Francisco Belmar ◽  
Pilar Candelas

In this work, we analyze the effect of predistortion techniques on the focusing profile of Fresnel Zone Plates (FZPs) in ultrasound applications. This novel predistortion method is based on either increasing or decreasing the width of some of the FZP Fresnel rings by a certain amount. We investigate how the magnitude of the predistortion, as well as the number and location of the predistorted rings, influences the lens focusing profile. This focusing profile can be affected in different ways depending on the area of the lens where the predistortion is applied. It is shown that when the inner area of the lens, closer to its center, is predistorted, this technique allows the control of the focal depth at the main focus. However, when the predistortion is applied to an area farther from the center of the lens, the acoustic intensity distribution among the main focus and the closest adjacent secondary foci can be tailored at a certain degree. This predistortion technique shows great potential and can be used to control, modify and shape the FZP focusing profile in both industrial and therapeutic applications.


2005 ◽  
Author(s):  
Michael R. Squillante ◽  
Richard A. Myers ◽  
Mitchell Woodring ◽  
James F. Christian ◽  
Frank Robertson ◽  
...  

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