Electron Beam Fabrication And Characterization Of Fresnel Zone Plates For Soft X-Ray Microscopy

1984 ◽  
Author(s):  
D Kern ◽  
P Coane ◽  
R Acosta ◽  
T.H. P. Chang ◽  
R Feder ◽  
...  
Keyword(s):  
Electron Beam ◽  
Fresnel Zone ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
Fabrication And Characterization

Electron-beam writing of large-area Fresnel zone plates

1998 ◽  
Vol 5 (3) ◽  
pp. 791-793
Author(s):  
Takeo Watanabe ◽  
Tomohiro Okada ◽  
Hiroo Kinoshita
Keyword(s):  
Electron Beam ◽  
Fresnel Zone ◽  
Large Field ◽  
Objective Lens ◽  
Large Area ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Width ◽  
Zone Plates ◽  
Outermost Zone

High-resolution X-ray microscopy requires advanced fabrication technology for Fresnel zone plates (FZPs). As the resolution of an FZP depends on the width of the outermost zone, fine zone patterns for objective lenses have to be replicated. On the other hand, to achieve highly condensed X-ray beams by using FZPs for condenser lenses, large-field replication is required. A method of pattern replication of FZPs for X-ray microscopy is reported. Utilizing a 30 keV electron-beam writing tool and an FZP-generation computer program, FZP patterns for a condenser lens 1 mm in diameter with an outermost-zone width of 0.2 µm and for an objective lens 0.5 mm in diameter with an outermost-zone width of 0.1 µm were replicated.

X-ray microscope images with Fresnel zone plates fabricated by electron beam nanolithography

1987 ◽  
Vol 6 (1-4) ◽  
pp. 565-570 ◽  
Author(s):  
P. Unger ◽  
V. Bögli ◽  
H. Beneking ◽  
B. Niemann ◽  
P. Guttmann
Keyword(s):  
Electron Beam ◽  
Fresnel Zone ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
Microscope Images

APD-based x-ray imaging telescope using Fresnel zone plates for extremely high spatial resolution

2005 ◽  
Author(s):  
Michael R. Squillante ◽  
Richard A. Myers ◽  
Mitchell Woodring ◽  
James F. Christian ◽  
Frank Robertson ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Fresnel Zone ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
X Ray Imaging ◽  
Imaging Telescope

Investigation on the Preparation of High Precision Multilayer X-ray Fresnel Zone Plates Based on Atomic Layer Deposition Technology

2021 ◽  
Vol 50 (1) ◽  
pp. 156-164
Author(s):  
吴鹿杰 Lujie WU ◽  
文庆涛 Qingtao WEN ◽  
高雅增 Yazeng GAO ◽  
卢维尔 Weier LU ◽  
夏洋 Yang XIA ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
High Precision ◽  
Fresnel Zone ◽  
Atomic Layer ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
Layer Deposition ◽  
Deposition Technology

scholarly journals High-efficiency zone-plate optics for multi-keV X-ray focusing

2014 ◽  
Vol 21 (3) ◽  
pp. 497-501 ◽  
Author(s):  
Istvan Mohacsi ◽  
Petri Karvinen ◽  
Ismo Vartiainen ◽  
Vitaliy A. Guzenko ◽  
Andrea Somogyi ◽  
...  
Keyword(s):  
Optical Transmission ◽  
High Efficiency ◽  
Fresnel Zone ◽  
Transmission Function ◽  
Zone Plate ◽  
X Rays ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
The Ideal

High-efficiency nanofocusing of hard X-rays using stacked multilevel Fresnel zone plates with a smallest zone width of 200 nm is demonstrated. The approach is to approximate the ideal parabolic lens profile with two-, three-, four- and six-level zone plates. By stacking binary and three-level zone plates with an additional binary zone plate, the number of levels in the optical transmission function was doubled, resulting in four- and six-level profiles, respectively. Efficiencies up to 53.7% focusing were experimentally obtained with 6.5 keV photons using a compact alignment apparatus based on piezoelectric actuators. The measurements have also been compared with numerical simulations to study the misalignment of the two zone plates.

scholarly journals High-acceptance versatile microfocus module based on elliptical Fresnel zone plates for small-angle X-ray scattering

2017 ◽  
Vol 25 (18) ◽  
pp. 21145 ◽  
Author(s):  
Maxime Lebugle ◽  
Marianne Liebi ◽  
Klaus Wakonig ◽  
Vitaliy A. Guzenko ◽  
Mirko Holler ◽  
...  
Keyword(s):  
Small Angle ◽  
Fresnel Zone ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates ◽  
X Ray Scattering ◽  
Ray Scattering

Investigation on Optical Matching of a Soft X-Ray Undulator with Some Condenser Fresnel Zone Plates

1987 ◽  
Vol 26 (Part 2, No. 1) ◽  
pp. L3-L6 ◽  
Author(s):  
Hideki Maezawa ◽  
Akira Mikuni ◽  
Masami Ando ◽  
Taizo Sasaki
Keyword(s):  
Fresnel Zone ◽  
Fresnel Zone Plates ◽  
X Ray ◽  
Zone Plates
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