Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy

1998 ◽  
Vol 73 (18) ◽  
pp. 2591-2593 ◽  
Author(s):  
Vladimir I. Merkulov ◽  
Douglas H. Lowndes ◽  
G. E. Jellison ◽  
A. A. Puretzky ◽  
D. B. Geohegan
1998 ◽  
Vol 526 ◽  
Author(s):  
Douglas H. Lowndes ◽  
Vladimir I. Merkulov ◽  
A. A. Puretzky ◽  
D. B. Geohegan ◽  
G. E. Jellison ◽  
...  

AbstractA systematic study has been made of changes in the bonding and optical properties of hydrogen-free tetrahedral amorphous carbon (ta-C) films, as a function of the kinetic energy of the incident carbon ions measured under film-deposition conditions. Ion probe measurements of the carbon ion kinetic energies produced by ArF and KrF laser ablation of graphite are compared under identical beam-focusing conditions. Much higher C+ kinetic energies are produced by ArF-laser ablation than by KrF for any given fluence and spot size. Electron energy loss spectroscopy and scanning ellipsometry measurements of the sp3 bonding fraction, plasmon energy, and optical properties reveal a well-defined optimum kinetic energy of 90 eV to deposit ta-C films having the largest sp3 fraction and the widest optical (Tauc) energy gap (equivalent to minimum near-gap optical absorption). Tapping-mode atomic force microscope measurements show that films deposited at near-optimum kinetic energy are extremely smooth, with rms roughness of only ~ 1 Å over distances of several hundred nm, and are relatively free of particulates.


2008 ◽  
Vol 112 (42) ◽  
pp. 16556-16560 ◽  
Author(s):  
Jon I. Apiñániz ◽  
Borja Sierra ◽  
Roberto Martínez ◽  
Asier Longarte ◽  
Carolina Redondo ◽  
...  

1988 ◽  
Vol 129 ◽  
Author(s):  
H. Helvajian ◽  
R. P. Welle

ABSTRACTAt laser threshold fluences near ion product formation, we have measured the ejected ion kinetic-energy distributions from the UV laser ablation of crystalline aluminum and silver targets. The mean kinetic energy is found to be hyperthermal.


2007 ◽  
Vol 59 ◽  
pp. 728-731
Author(s):  
C Sánchez Aké ◽  
H Sobral1 ◽  
P Ramos-Alvarez ◽  
C Lemen ◽  
M Villagrán-Muniz

2000 ◽  
Vol 617 ◽  
Author(s):  
R. M. Mayo ◽  
J. W. Newman ◽  
A. Sharma ◽  
Y. Yamagata ◽  
J. Narayan

AbstractIn an ongoing effort to investigate plasma plume features yielding high quality DLC films, we have applied plasma plume diagnosis and film characterization to examine plume character distinction from KrF laser ablation of both amorphous carbon (a-C) and single crystal graphite (SCG) targets- The advancing plasma plume produced by these structurally different targets are observed to possess quantitatively similar total heavy particle inventory, ionized fraction, and electron thermal content, yet quite different ion kinetic energy, plume profile, C2 formation mechanism, and concentration of complex molecules. All data support the conclusion that the SCG target plasma plume is populated with heavier, more complex molecules than those in a-C which have been shown to be predominantly comprised of C and C+ under vacuum conditions with the addition of C2 at high fill pressure. Significantly smaller plume profile peaking factor, less energetic and slightly lower temperature plume conditions, laser energy (E1) dependent plume peaking, harder films produced at lower El strongly heterogeneous films, and lesser plume energy attenuation in high pressure background fill in SCG target plumes all support the conclusion of more massive plume species in SCG target plumes. Energy balance estimates indicate that ion kinetic energy dominates and that SCG target ablation liberates about twice the number of 12C atoms per unit El.


2012 ◽  
Vol 20 (9) ◽  
pp. 9763 ◽  
Author(s):  
Yuechen Jia ◽  
Ningning Dong ◽  
Feng Chen ◽  
Javier R. Vázquez de Aldana ◽  
Sh. Akhmadaliev ◽  
...  

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