Dynamics of electron beam ablation of silicon dioxide measured by dye laser resonance absorption photography

S. D. Kovaleski; R. M. Gilgenbach; L. K. Ang; Y. Y. Lau

doi:10.1063/1.122510

Dynamics of electron beam ablation of silicon dioxide measured by dye laser resonance absorption photography

Applied Physics Letters ◽

10.1063/1.122510 ◽

1998 ◽

Vol 73 (18) ◽

pp. 2576-2578 ◽

Cited By ~ 8

Author(s):

S. D. Kovaleski ◽

R. M. Gilgenbach ◽

L. K. Ang ◽

Y. Y. Lau

Keyword(s):

Electron Beam ◽

Silicon Dioxide ◽

Resonance Absorption ◽

Dye Laser ◽

Laser Resonance

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Schlieren and dye laser resonance absorption photographic investigations of KrF excimer laser‐ablated atoms and molecules from polyimide, polyethyleneterephthalate, and aluminum

Journal of Applied Physics ◽

10.1063/1.351693 ◽

1992 ◽

Vol 72 (5) ◽

pp. 1696-1706 ◽

Cited By ~ 40

Author(s):

Peter L. G. Ventzek ◽

Ronald M. Gilgenbach ◽

Chi Hong Ching ◽

Roger A. Lindley

Keyword(s):

Excimer Laser ◽

Resonance Absorption ◽

Dye Laser ◽

Laser Resonance ◽

Atoms And Molecules ◽

Krf Excimer Laser

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Dynamics of excimer laser‐ablated aluminum neutral atom plume measured by dye laser resonance absorption photography

Applied Physics Letters ◽

10.1063/1.105136 ◽

1991 ◽

Vol 58 (15) ◽

pp. 1597-1599 ◽

Cited By ~ 70

Author(s):

Ronald M. Gilgenbach ◽

Peter L. G. Ventzek

Keyword(s):

Excimer Laser ◽

Neutral Atom ◽

Resonance Absorption ◽

Dye Laser ◽

Laser Resonance

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Selectivity variations of electron beam patterned silicon dioxide films*

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579193 ◽

1994 ◽

Vol 12 (4) ◽

pp. 2457-2461 ◽

Cited By ~ 1

Author(s):

John F. Kimball ◽

Patricia E. Allen ◽

Dieter P. Griffis ◽

Zbigniew J. Radzimski ◽

Phillip E. Russell

Keyword(s):

Electron Beam ◽

Silicon Dioxide ◽

Silicon Dioxide Films

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Resonance absorption of radiation field by an intense relativistic electron beam in inverse cyclotron maser geometry

Applied Physics Letters ◽

10.1063/1.99338 ◽

1988 ◽

Vol 52 (9) ◽

pp. 757-759 ◽

Cited By ~ 1

Author(s):

Sunao Kawasaki ◽

Kei‐ichi Kamada ◽

Masaru Masuzaki ◽

Hiroshi Takuma

Keyword(s):

Electron Beam ◽

Relativistic Electron ◽

Radiation Field ◽

Relativistic Electron Beam ◽

Resonance Absorption ◽

Cyclotron Maser

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Direct-write electron beam lithography in silicon dioxide at low energy

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3478304 ◽

2010 ◽

Vol 28 (5) ◽

pp. 940-945 ◽

Cited By ~ 4

Author(s):

Arnaud Beaumont ◽

Christian Dubuc ◽

Jacques Beauvais ◽

Dominique Drouin

Keyword(s):

Electron Beam ◽

Silicon Dioxide ◽

Electron Beam Lithography ◽

Low Energy ◽

Direct Write

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Silicon nanoclusters formation in silicon dioxide by high power density electron beam

Physica B Condensed Matter ◽

10.1016/j.physb.2009.08.133 ◽

2009 ◽

Vol 404 (23-24) ◽

pp. 4653-4656 ◽

Cited By ~ 10

Author(s):

E.V. Kolesnikova ◽

M.V. Zamoryanskaya

Keyword(s):

Electron Beam ◽

Silicon Dioxide ◽

Power Density ◽

High Power ◽

High Power Density ◽

Silicon Nanoclusters

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Electromagnetic pulse self-compression under cyclotron resonance absorption by plasma or electron beam

35th International Conference on Infrared, Millimeter, and Terahertz Waves ◽

10.1109/icimw.2010.5612332 ◽

2010 ◽

Author(s):

Naum S. Ginzburg ◽

Irina V. Zotova ◽

Alexander S. Sergeev

Keyword(s):

Electron Beam ◽

Cyclotron Resonance ◽

Electromagnetic Pulse ◽

Resonance Absorption

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Generation of lithium plasmas for ion diodes by laser resonance absorption

10.1364/cleo.1984.tub43 ◽

1984 ◽

Author(s):

G. C. Tisone ◽

J. K. Rice

Keyword(s):

Resonance Absorption ◽

Laser Resonance

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Electron-beam recrystallized polysilicon on silicon dioxide

Microelectronics Reliability ◽

10.1016/0026-2714(84)90432-3 ◽

1984 ◽

Vol 24 (4) ◽

pp. 825

Keyword(s):

Electron Beam ◽

Silicon Dioxide

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Mechanism of charge storage in electron-beam or corona-charged silicon-dioxide electrets

IEEE Transactions on Electrical Insulation ◽

10.1109/14.68225 ◽

1991 ◽

Vol 26 (1) ◽

pp. 42-48 ◽

Cited By ~ 32

Author(s):

P. Gunther

Keyword(s):

Electron Beam ◽

Silicon Dioxide ◽

Charge Storage

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