Carbon doping and etching of AlxGa1−xAs (0⩽x⩽1) with carbon tetrachloride in metalorganic vapor phase epitaxy

1997 ◽  
Vol 70 (26) ◽  
pp. 3600-3602 ◽  
Author(s):  
H. Q. Hou
Keyword(s):  
Carbon Tetrachloride ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Carbon Doping

Controlled carbon doping of GaAs by metalorganic vapor phase epitaxy

1988 ◽  
Vol 53 (14) ◽  
pp. 1317-1319 ◽  
Author(s):  
T. F. Kuech ◽  
M. A. Tischler ◽  
P.‐J. Wang ◽  
G. Scilla ◽  
R. Potemski ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Carbon Doping

Quantitative study of carbon doping of GaAs grown by metalorganic vapor-phase epitaxy

2000 ◽  
Vol 209 (1) ◽  
pp. 43-49 ◽  
Author(s):  
Yanning Gong ◽  
Jinji Mo ◽  
Haisheng Yu ◽  
Le Wang ◽  
Guanqun Xia
Keyword(s):  
Quantitative Study ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Carbon Doping

scholarly journals Carbon doping of InAlAs layers grown by metalorganic vapor phase epitaxy

2002 ◽  
Vol 32 (2a) ◽  
pp. 362-365 ◽  
Author(s):  
M. L. P. Ribeiro ◽  
B. Yavich ◽  
C. V. B. Tribuzy ◽  
P. L. Souza
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Carbon Doping

Acceptor doping of (Al,Ga)As using carbon by metalorganic vapor phase epitaxy

1991 ◽  
Vol 107 (1-4) ◽  
pp. 268-273 ◽  
Author(s):  
M.A. Tischler ◽  
R.M. Potemski ◽  
T.F. Kuech ◽  
F. Cardone ◽  
M.S. Goorsky ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Acceptor Doping
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