Low temperature plasma process based on CO-rich CO/H2 mixtures for high rate diamond film deposition

1997 ◽  
Vol 70 (12) ◽  
pp. 1527-1529 ◽  
Author(s):  
Joungchel Lee ◽  
R. W. Collins ◽  
R. Messier ◽  
Y. E. Strausser
Keyword(s):  
Low Temperature ◽  
Diamond Film ◽  
Film Deposition ◽  
High Rate ◽  
Low Temperature Plasma ◽  
Plasma Process ◽  
Temperature Plasma

Fast Low-Temperature Plasma Process for the Application of Flexible Tin-Oxide-Channel Thin Film Transistors

2017 ◽  
Vol 16 (5) ◽  
pp. 876-879 ◽  
Author(s):  
Po-Chun Chen ◽  
Yu-Chien Chiu ◽  
Zhi-Wei Zheng ◽  
Ming-Huei Lin ◽  
Chun-Hu Cheng ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Tin Oxide ◽  
Thin Film Transistors ◽  
Low Temperature Plasma ◽  
Plasma Process ◽  
Temperature Plasma

scholarly journals Preparation of ionically conductive thin polymer films by low temperature plasma process.

MEMBRANE ◽  
1990 ◽  
Vol 15 (6) ◽  
pp. 288-295
Author(s):  
Zempachi Ogumi ◽  
Yoshiharu Uchimoto ◽  
Zen-ichiro Takehara
Keyword(s):  
Low Temperature ◽  
Polymer Films ◽  
Low Temperature Plasma ◽  
Thin Polymer Films ◽  
Plasma Process ◽  
Temperature Plasma ◽  
Thin Polymer
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