Characterization of carbon nitride thin films prepared by dual ion beam sputtering

1996 ◽  
Vol 69 (6) ◽  
pp. 764-766 ◽  
Author(s):  
A. Fernández ◽  
P. Prieto ◽  
C. Quirós ◽  
J. M. Sanz ◽  
J.‐M. Martin ◽  
...  
Keyword(s):  
Thin Films ◽  
Carbon Nitride ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Characterization of Zr thin films grown by dual ion-beam sputtering

Vacuum ◽  
1994 ◽  
Vol 45 (10-11) ◽  
pp. 1039-1041 ◽  
Author(s):  
JF Trigo ◽  
E Elizalde ◽  
C Quirós ◽  
JM Sanz
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Epitaxial growth of MgO thin films on silicon by dual ion beam sputtering

1993 ◽  
Vol 223 (1) ◽  
pp. 11-13 ◽  
Author(s):  
Yijie Li ◽  
Guangcheng Xiong ◽  
Guijun Lian ◽  
Jie Li ◽  
Zizhao Gan
Keyword(s):  
Thin Films ◽  
Epitaxial Growth ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Hard BCxNy thin films grown by dual ion beam sputtering

2006 ◽  
Vol 515 (1) ◽  
pp. 207-211 ◽  
Author(s):  
C. Morant ◽  
P. Prieto ◽  
J. Bareño ◽  
J.M. Sanz ◽  
E. Elizalde
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Processing of La1.8Sr0.2CuO4and YBa2Cu3O7superconducting thin films by dual‐ion‐beam sputtering

1988 ◽  
Vol 63 (6) ◽  
pp. 2046-2053 ◽  
Author(s):  
P. Madakson ◽  
J. J. Cuomo ◽  
D. S. Yee ◽  
R. A. Roy ◽  
G. Scilla
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering
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