Mechanism of nitrogen coimplant for suppressing boron penetration in p+‐polycrystalline silicon gate of p metal–oxide semiconductor field effect transistor
2004 ◽
Vol 43
(11A)
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pp. 7462-7463
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2021 ◽
Vol 134
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pp. 106046
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2020 ◽
Vol 21
(3)
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pp. 339-347
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1997 ◽
Vol 9
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pp. 1143-1145
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2010 ◽
Vol 49
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pp. 04DE16
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