Measurement of non‐Maxwellian electron energy distributions in an inductively coupled plasma

1996 ◽  
Vol 69 (24) ◽  
pp. 3683-3685 ◽  
Author(s):  
T. Hori ◽  
M. D. Bowden ◽  
K. Uchino ◽  
K. Muraoka
Keyword(s):  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
Energy Distributions ◽  
Inductively Coupled

Electron energy distributions in a magnetized inductively coupled plasma

2014 ◽  
Vol 21 (9) ◽  
pp. 093512 ◽  
Author(s):  
Sang-Heon Song ◽  
Yang Yang ◽  
Pascal Chabert ◽  
Mark J. Kushner
Keyword(s):  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
Energy Distributions ◽  
Inductively Coupled

External control of electron energy distributions in a dual tandem inductively coupled plasma

2015 ◽  
Vol 118 (8) ◽  
pp. 083303 ◽  
Author(s):  
Lei Liu ◽  
Shyam Sridhar ◽  
Weiye Zhu ◽  
Vincent M. Donnelly ◽  
Demetre J. Economou ◽  
...  
Keyword(s):  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
External Control ◽  
Energy Distributions ◽  
Inductively Coupled

A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering

1998 ◽  
Vol 83 (4) ◽  
pp. 1909-1916 ◽  
Author(s):  
T. Hori ◽  
M. Kogano ◽  
M. D. Bowden ◽  
K. Uchino ◽  
K. Muraoka
Keyword(s):  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
Thomson Scattering ◽  
Energy Distributions ◽  
Inductively Coupled
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