Thin layer thickness measurements based on the acousto‐optic technique

1996 ◽  
Vol 68 (12) ◽  
pp. 1732-1734 ◽  
Author(s):  
S. Devolder ◽  
M. Wevers ◽  
P. De Meester ◽  
O. Leroy
Keyword(s):  
Thin Layer ◽  
Layer Thickness ◽  
Thickness Measurements

Thin layer thickness measurements by zero group velocity Lamb mode resonances

2011 ◽  
Vol 82 (11) ◽  
pp. 114902 ◽  
Author(s):  
Maximin Cès ◽  
Dominique Clorennec ◽  
Daniel Royer ◽  
Claire Prada
Keyword(s):  
Thin Layer ◽  
Group Velocity ◽  
Layer Thickness ◽  
Zero Group ◽  
Thickness Measurements ◽  
Lamb Mode

scholarly journals Terahertz quantum sensing

2020 ◽  
Vol 6 (11) ◽  
pp. eaaz8065 ◽  
Author(s):  
Mirco Kutas ◽  
Björn Haase ◽  
Patricia Bickert ◽  
Felix Riexinger ◽  
Daniel Molter ◽  
...  
Keyword(s):  
Layer Thickness ◽  
Region Of Interest ◽  
Coherent Detection ◽  
Semiconductor Detectors ◽  
Terahertz Frequency ◽  
Sensing Applications ◽  
Highly Sensitive ◽  
Quantum Sensing ◽  
Thickness Measurements ◽  
Detection Schemes

Quantum sensing is highly attractive for accessing spectral regions in which the detection of photons is technically challenging: Sample information is gained in the spectral region of interest and transferred via biphoton correlations into another spectral range, for which highly sensitive detectors are available. This is especially beneficial for terahertz radiation, where no semiconductor detectors are available and coherent detection schemes or cryogenically cooled bolometers have to be used. Here, we report on the first demonstration of quantum sensing in the terahertz frequency range in which the terahertz photons interact with a sample in free space and information about the sample thickness is obtained by the detection of visible photons. As a first demonstration, we show layer thickness measurements with terahertz photons based on biphoton interference. As nondestructive layer thickness measurements are of high industrial relevance, our experiments might be seen as a first step toward industrial quantum sensing applications.

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