Streaming metal plasma generation by vacuum arc plasma guns

1998 ◽  
Vol 69 (2) ◽  
pp. 801-803 ◽  
Author(s):  
R. A. MacGill ◽  
M. R. Dickinson ◽  
A. Anders ◽  
O. R. Monteiro ◽  
I. G. Brown
Keyword(s):  
Vacuum Arc ◽  
Arc Plasma ◽  
Plasma Generation ◽  
Metal Plasma ◽  
Plasma Guns

Vacuum Arc Plasma Guns and Ion Sources

2005 ◽  
Vol 107 ◽  
pp. 63-68
Author(s):  
Ian G. Brown
Keyword(s):  
Plasma Deposition ◽  
Ion Source ◽  
Ion Sources ◽  
Particle Accelerator ◽  
Vacuum Arc ◽  
Arc Plasma ◽  
High Current ◽  
Plasma Gun ◽  
Metal Plasma ◽  
Plasma Guns

Vacuum arc plasma can be formed using particularly uncomplicated hardware, providing a means for laboratory scale formation of dense and highly-ionized metal plasma. The simplicity and versatility of the approach has led to its widespread use in recent times for both fundamental and technological applications. When embodied in a plasma gun configuration, the source can provide a valuable tool for plasma deposition of metal and metal-containing thin films, including in plasma immersion configurations. When embodied in an ion source configuration, high current beams of metal ions can be formed, and such beams have found good use for ion implantation and particle accelerator injection. Here we briefly review vacuum arc plasma guns and ion sources, outlining some of the hardware embodiments that have been developed at Berkeley and used for various materials modification applications.

scholarly journals Vacuum arc plasma generation and thin film deposition from a TiB2cathode

2015 ◽  
Vol 107 (18) ◽  
pp. 184103 ◽  
Author(s):  
Igor Zhirkov ◽  
Andrejs Petruhins ◽  
Lars-Ake Naslund ◽  
Szilard Kolozsvári ◽  
Peter Polcik ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Vacuum Arc ◽  
Arc Plasma ◽  
Plasma Generation

scholarly journals Effect of Ti-Al cathode grain size on plasma generation and thin film synthesis from a direct current vacuum arc plasma source

AIP Advances ◽  
2019 ◽  
Vol 9 (4) ◽  
pp. 045008
Author(s):  
Igor Zhirkov ◽  
Andrejs Petruhins ◽  
Peter Polcik ◽  
Szilard Kolozsvári ◽  
Johanna Rosen
Keyword(s):  
Thin Film ◽  
Grain Size ◽  
Direct Current ◽  
Plasma Source ◽  
Vacuum Arc ◽  
Arc Plasma ◽  
Plasma Generation ◽  
Film Synthesis

scholarly journals Thin Film Synthesis Using Miniature Pulsed Metal Vapor Vacuum arc Plasma Guns

1990 ◽  
Vol 190 ◽  
Author(s):  
X. Godechot ◽  
M. B. Salmeron ◽  
D. F. Ogletree ◽  
J. E. Galvin ◽  
R. A. Macgill ◽  
...  
Keyword(s):  
Thin Film ◽  
Metal Vapor ◽  
Vacuum Arc ◽  
Arc Plasma ◽  
Film Synthesis ◽  
Plasma Guns

Use of vacuum arc plasma guns for a metal puff Z-pinch system

2011 ◽  
Vol 18 (9) ◽  
pp. 092707 ◽  
Author(s):  
A. G. Rousskikh ◽  
A. S. Zhigalin ◽  
V. I. Oreshkin ◽  
S. A. Chaikovsky ◽  
N. A. Labetskaya ◽  
...  
Keyword(s):  
Vacuum Arc ◽  
Arc Plasma ◽  
Plasma Guns ◽  
Z Pinch
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