X‐ray imaging spectroscopy of an electron cyclotron resonance discharge

U. Lehnert; G. Zschornack

doi:10.1063/1.1146693

X‐ray imaging spectroscopy of an electron cyclotron resonance discharge

Review of Scientific Instruments ◽

10.1063/1.1146693 ◽

1996 ◽

Vol 67 (3) ◽

pp. 1264-1266 ◽

Cited By ~ 8

Author(s):

U. Lehnert ◽

G. Zschornack

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Imaging Spectroscopy ◽

Electron Cyclotron ◽

X Ray ◽

X Ray Imaging

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Electron cyclotron resonance ion source plasma characterization by X-ray spectroscopy and X-ray imaging

Review of Scientific Instruments ◽

10.1063/1.4939201 ◽

2016 ◽

Vol 87 (2) ◽

pp. 02A510 ◽

Cited By ~ 18

Author(s):

David Mascali ◽

Giuseppe Castro ◽

Sándor Biri ◽

Richárd Rácz ◽

József Pálinkás ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

X Ray ◽

X Ray Imaging ◽

Plasma Characterization

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X-ray imaging for electron cyclotron resonance processing plasmas

IEEE Conference Record - Abstracts. 1992 IEEE International Conference on Plasma ◽

10.1109/plasma.1992.697983 ◽

2005 ◽

Author(s):

K.H. Chew ◽

J.L. Shohet ◽

T.J. Castagna

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

X Ray ◽

X Ray Imaging

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Electron cyclotron resonance ion source plasma characterization by energy dispersive x-ray imaging

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aa758f ◽

2017 ◽

Vol 26 (7) ◽

pp. 075011 ◽

Cited By ~ 14

Author(s):

R Rácz ◽

D Mascali ◽

S Biri ◽

C Caliri ◽

G Castro ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Energy Dispersive ◽

X Ray ◽

X Ray Imaging ◽

Plasma Characterization

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X-ray photoelectron diffraction observation of β-SiC(001) obtained by electron cyclotron resonance plasma assisted growth on Si(001)

Applied Surface Science ◽

10.1016/0169-4332(93)90239-8 ◽

1993 ◽

Vol 68 (4) ◽

pp. 575-582 ◽

Cited By ~ 20

Author(s):

M. Diani ◽

J.L. Bischoff ◽

L. Kubler ◽

D. Bolmont

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

X Ray ◽

Photoelectron Diffraction ◽

Resonance Plasma

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Experimental studies on a compact electron cyclotron resonance plasma x-ray source

Review of Scientific Instruments ◽

10.1063/1.1149821 ◽

1999 ◽

Vol 70 (6) ◽

pp. 2637-2645 ◽

Cited By ~ 15

Author(s):

R. Baskaran ◽

T. S. Selvakumaran

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Experimental Studies ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

X Ray ◽

Resonance Plasma

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X‐ray photoemission and Raman scattering spectroscopic study of surface modifications of silicon induced by electron cyclotron resonance etching

Applied Physics Letters ◽

10.1063/1.103607 ◽

1990 ◽

Vol 57 (6) ◽

pp. 590-592 ◽

Cited By ~ 6

Author(s):

A. S. Yapsir ◽

G. S. Oehrlein ◽

G. Fortuño‐Wiltshire ◽

J. C. Tsang

Keyword(s):

Raman Scattering ◽

Spectroscopic Study ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Surface Modifications ◽

Electron Cyclotron ◽

X Ray

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SiC x-ray lithography mask fabricated by electron cyclotron resonance plasma source coupled with divided microwaves

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589378 ◽

1997 ◽

Vol 15 (3) ◽

pp. 736 ◽

Cited By ~ 2

Author(s):

Masaru Shimada

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

X Ray ◽

Resonance Plasma

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Measurement of ion charge state distributions inside electron cyclotron resonance neon and chlorine plasmas by x-ray spectroscopy (abstract)

Review of Scientific Instruments ◽

10.1063/1.1149228 ◽

1998 ◽

Vol 69 (2) ◽

pp. 1203-1203

Author(s):

P. Grübling ◽

D. Küchler ◽

A. Ullrich ◽

T. Werner ◽

G. Zschornack

Keyword(s):

Charge State ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

X Ray ◽

Charge State Distributions

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Maximum x-ray energy from compact electron cyclotron resonance based source of x rays

Review of Scientific Instruments ◽

10.1063/1.1480456 ◽

2002 ◽

Vol 73 (6) ◽

pp. 2287-2291 ◽

Cited By ~ 10

Author(s):

C. Rouillé ◽

K. Serebrennikov ◽

M. Bacal

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

X Rays ◽

X Ray

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Ultrahigh-Vacuum Electron Cyclotron Resonance-Plasma Chemical-Vapor-DepositedSiNxFilms for X-Ray Lithography Mask Membrane: As-Deposited Properties and Radiation Stability

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.6908 ◽

1994 ◽

Vol 33 (Part 1, No. 12B) ◽

pp. 6908-6912 ◽

Cited By ~ 1

Author(s):

Jinho Ahn ◽

Katsumi Suzuki ◽

Shinji Tsuboi ◽

Yoshio Yamashita

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Radiation Stability ◽

Electron Cyclotron ◽

Plasma Chemical ◽

Electron Cyclotron Resonance Plasma ◽

X Ray ◽

Resonance Plasma

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