Development and application of a nozzle‐beam‐type microwave radical source
1995 ◽
Vol 66
(2)
◽
pp. 1015-1017
◽
1996 ◽
Vol 67
(3)
◽
pp. 1006-1008
◽
1976 ◽
1995 ◽
Vol 66
(8)
◽
pp. 4166-4169
◽
Keyword(s):
2003 ◽
Vol 17
(1-3)
◽
pp. 251-258
◽
1987 ◽
Vol 24
(5)
◽
pp. 469-473
◽
2017 ◽
Vol 45
(9)
◽
pp. 793-804
◽