Low‐temperature, uniform, and high‐density plasma produced by a new ultra‐high‐frequency discharge with a spokewise antenna

1995 ◽  
Vol 67 (10) ◽  
pp. 1414-1416 ◽  
Author(s):  
Seiji Samukawa ◽  
Yukito Nakagawa ◽  
Tsutomu Tsukada ◽  
Hiroyuki Ueyama ◽  
Kibatsu Shinohara
Keyword(s):  
Low Temperature ◽  
High Frequency ◽  
High Density ◽  
Ultra High Frequency ◽  
High Frequency Discharge ◽  
Density Plasma

The impact of treating graphene oxide with a pulsed high-frequency discharge on the low-temperature sorption of hydrogen

2020 ◽  
Vol 46 (3) ◽  
pp. 293-300 ◽  
Author(s):  
A. V. Dolbin ◽  
N. A. Vinnikov ◽  
V. B. Esel’son ◽  
V. G. Gavrilko ◽  
R. M. Basnukaeva ◽  
...  
Keyword(s):  
Graphene Oxide ◽  
Low Temperature ◽  
High Frequency ◽  
High Frequency Discharge ◽  
The Impact

Low Temperature Gate Oxidation MOS Transistor Produced by Kr/O2 Microwave Excited High-Density Plasma

2000 ◽  
Author(s):  
Tatsufumi Hamada ◽  
Yuji Saito ◽  
Katsuyuki Sekine ◽  
Herzl Aharoni ◽  
Tadahiro Ohmi
Keyword(s):  
Low Temperature ◽  
High Density ◽  
Mos Transistor ◽  
Density Plasma
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