A high intensity sputter negative ion source with multitarget positions and target scanners
1990 ◽
Vol 61
(1)
◽
pp. 427-429
◽
1997 ◽
Vol 123
(1-4)
◽
pp. 550-553
◽
1988 ◽
Vol 270
(1)
◽
pp. 194-197
◽
1992 ◽
Vol 63
(4)
◽
pp. 2455-2457
◽
1988 ◽
Keyword(s):
1993 ◽
Vol 328
(1-2)
◽
pp. 207-210
◽
1983 ◽
Vol 214
(2-3)
◽
pp. 139-150
◽