Retarding‐field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low‐pressure radio frequency discharges

Christian Böhm; Jérôme Perrin

doi:10.1063/1.1144398

Retarding‐field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in low‐pressure radio frequency discharges

Review of Scientific Instruments ◽

10.1063/1.1144398 ◽

1993 ◽

Vol 64 (1) ◽

pp. 31-44 ◽

Cited By ~ 179

Author(s):

Christian Böhm ◽

Jérôme Perrin

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Low Pressure ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

Download Full-text

Effect of electrode material on measured ion energy distributions in radio‐frequency discharges

Applied Physics Letters ◽

10.1063/1.114540 ◽

1995 ◽

Vol 67 (4) ◽

pp. 473-475 ◽

Cited By ~ 18

Author(s):

J. K. Olthoff ◽

R. J. Van Brunt ◽

S. B. Radovanov

Keyword(s):

Radio Frequency ◽

Electrode Material ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

Download Full-text

Ion energy distributions in inductively coupled radio-frequency discharges in argon, nitrogen, oxygen, chlorine, and their mixtures

Journal of Applied Physics ◽

10.1063/1.370138 ◽

1999 ◽

Vol 85 (9) ◽

pp. 6358-6365 ◽

Cited By ~ 54

Author(s):

Yicheng Wang ◽

J. K. Olthoff

Keyword(s):

Radio Frequency ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

Download Full-text

Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges

Journal of Applied Physics ◽

10.1063/1.372148 ◽

2000 ◽

Vol 87 (5) ◽

pp. 2114-2121 ◽

Cited By ~ 27

Author(s):

Yicheng Wang ◽

Eric C. Benck ◽

Martin Misakian ◽

Manabu Edamura ◽

James K. Olthoff

Keyword(s):

Radio Frequency ◽

Energy Distributions ◽

Time Resolved ◽

Ion Energy ◽

Optical Emissions ◽

Radio Frequency Discharges ◽

Ion Energy Distributions ◽

Time Resolved Measurements

Download Full-text

Ion energy distributions in radio frequency discharges sustained in gas mixtures obtained using a Monte Carlo-fluid hybrid model: endothermic processes and ion holes

Plasma Sources Science and Technology ◽

10.1088/0963-0252/3/2/010 ◽

1994 ◽

Vol 3 (2) ◽

pp. 190-205 ◽

Cited By ~ 6

Author(s):

H H Hwang ◽

M J Kushner

Keyword(s):

Monte Carlo ◽

Radio Frequency ◽

Hybrid Model ◽

Gas Mixtures ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

Download Full-text

Ion energy distributions in radio‐frequency discharges

Journal of Applied Physics ◽

10.1063/1.350247 ◽

1991 ◽

Vol 70 (1) ◽

pp. 82-92 ◽

Cited By ~ 53

Author(s):

D. Field ◽

D. F. Klemperer ◽

P. W. May ◽

Y. P. Song

Keyword(s):

Radio Frequency ◽

Energy Distributions ◽

Ion Energy ◽

Radio Frequency Discharges ◽

Ion Energy Distributions

Download Full-text

Spatial variations of radio frequency plasma density caused by a step‐change of secondary electron emission coefficient

Journal of Applied Physics ◽

10.1063/1.359452 ◽

1995 ◽

Vol 77 (9) ◽

pp. 4293-4301 ◽

Cited By ~ 4

Author(s):

Weilu Xu ◽

Paul J. Sides

Keyword(s):

Radio Frequency ◽

Plasma Density ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Step Change ◽

Radio Frequency Plasma ◽

Emission Coefficient ◽

Secondary Electron Emission Coefficient ◽

Frequency Plasma

Download Full-text

A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/49/23/234001 ◽

2016 ◽

Vol 49 (23) ◽

pp. 234001 ◽

Cited By ~ 17

Author(s):

M Daksha ◽

B Berger ◽

E Schuengel ◽

I Korolov ◽

A Derzsi ◽

...

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Spectroscopic Technique

Download Full-text

Secondary electron emission as a technique for in situ crystal alignment in low ion-energy reflection experiments

Journal of Physics E Scientific Instruments ◽

10.1088/0022-3735/6/12/005 ◽

1973 ◽

Vol 6 (12) ◽

pp. 1174-1175 ◽

Cited By ~ 8

Author(s):

H H W Feijen ◽

L K Verhey ◽

A L Boers ◽

E P Th M Suurmeijer

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Ion Energy ◽

Crystal Alignment

Download Full-text

The role of electron induced secondary electron emission from SiO2surfaces in capacitively coupled radio frequency plasmas operated at low pressures

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aa963d ◽

2017 ◽

Vol 26 (12) ◽

pp. 124001 ◽

Cited By ~ 23

Author(s):

B Horváth ◽

M Daksha ◽

I Korolov ◽

A Derzsi ◽

J Schulze

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Capacitively Coupled ◽

Low Pressures

Download Full-text

On the role of secondary electron emission in capacitively coupled radio‐frequency plasma sheath: A theoretical ground

Plasma Processes and Polymers ◽

10.1002/ppap.201900093 ◽

2019 ◽

Vol 16 (11) ◽

pp. 1900093 ◽

Cited By ~ 2

Author(s):

Guang‐Yu Sun ◽

Han‐Wei Li ◽

An‐Bang Sun ◽

Yuan Li ◽

Bai‐Peng Song ◽

...

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Plasma Sheath ◽

Theoretical Ground ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

Download Full-text