Electron optical design of a high‐resolution low‐voltage scanning electron microscope with field emission gun

1993 ◽  
Vol 64 (10) ◽  
pp. 2905-2910 ◽  
Author(s):  
Jiye Ximen ◽  
P. S. D. Lin ◽  
J. B. Pawley ◽  
M. Schippert
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Field Emission ◽  
Low Voltage ◽  
Optical Design ◽  
Voltage Scanning ◽  
Scanning Electron

Electron-optical design of a high-resolution objective lens for low-voltage Scanning Electron Microscope of biological applications

1992 ◽  
Vol 50 (2) ◽  
pp. 950-951
Author(s):  
J. Ximen ◽  
P. S. D. Lin ◽  
J. B. Pawley ◽  
M. Schippert
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Surface Characterization ◽  
Low Voltage ◽  
Optical Design ◽  
Objective Lens ◽  
Magnetic Lens ◽  
Voltage Scanning ◽  
Scanning Electron

By providing higher image contrast and reduced charging artifacts, the low voltage scanning electron microscope (LVSEM) is a valuable tool for surface characterization, of particular importance on nonconductive material such as biological specimens. Several SEM designs optimized for use at low voltage have been proposed.Recently, we have designed a new high resolution LVSEM using a field emission gun. The key problem is to decrease both the spherical and chromatic aberration coefficients by using a magnetic lens of small bore diameters(5mm and 10mm) and a narrow gap (7.5mm) (FIG. 1). In our first design, the magnetic lens is built around the side-entry stage of a Philips 300kV TEM and performs as well as that in the present Hitachi SEM H-900 or H-900S. Its simple design has been chosen for reliability and flexibility in farbrication.

Contrast Effects in High Resolution, Low Voltage SEM

1974 ◽  
Vol 32 ◽  
pp. 452-453
Author(s):  
L. M. Welter
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Field Emission ◽  
Low Voltage ◽  
Electron Source ◽  
Scanning Microscopy ◽  
Contrast Effects ◽  
Probe Current ◽  
Scanning Electron

A scanning electron microscope using a field emission electron source and a single electromagnetic lens can produce a resolution of less than 180Å using an accelerating voltage of only 900v. High resolution, low voltage (0.1-2kV) scanning microscopy offers a number of advantages over the use of higher accelerating voltages. Specimen damage may be reduced because the power (P≃IV) which must be absorbed by the specimen for operation at a given probe current (I) is decreased in proportion to the reduction in accelerating voltage (V).

Field Emission SEM Equipped With Noise Compensator

1973 ◽  
Vol 31 ◽  
pp. 302-303
Author(s):  
S. Saito ◽  
H. Todokoro ◽  
S. Nomura ◽  
T. Komoda
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Field Emission ◽  
Low Contrast ◽  
Probe Current ◽  
High Resolution Images ◽  
Scanning Electron

Field emission scanning electron microscope (FESEM) features extremely high resolution images, and offers many valuable information. But, for a specimen which gives low contrast images, lateral stripes appear in images. These stripes are resulted from signal fluctuations caused by probe current noises. In order to obtain good images without stripes, the fluctuations should be less than 1%, especially for low contrast images. For this purpose, the authors realized a noise compensator, and applied this to the FESEM.Fig. 1 shows an outline of FESEM equipped with a noise compensator. Two apertures are provided gust under the field emission gun.

Comparison of freeze-fractured yeast replicas using conventional TEM and low-voltage field-emission SEM

1989 ◽  
Vol 47 ◽  
pp. 74-75
Author(s):  
William P. Wergin ◽  
Eric F. Erbe ◽  
Terrence W. Reilly
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Field Emission ◽  
Low Voltage ◽  
Objective Lens ◽  
Specimen Preparation ◽  
Lens System ◽  
Air Drying ◽  
Preparation Techniques ◽  
Scanning Electron

Although the first commercial scanning electron microscope (SEM) was introduced in 1965, the limited resolution and the lack of preparation techniques initially confined biological observations to relatively low magnification images showing anatomical surface features of samples that withstood the artifacts associated with air drying. As the design of instrumentation improved and the techniques for specimen preparation developed, the SEM allowed biologists to gain additional insights not only on the external features of samples but on the internal structure of tissues as well. By 1985, the resolution of the conventional SEM had reached 3 - 5 nm; however most biological samples still required a conductive coating of 20 - 30 nm that prevented investigators from approaching the level of information that was available with various TEM techniques. Recently, a new SEM design combined a condenser-objective lens system with a field emission electron source.

Investigation of the Image Contrast in an Ultra-Low Voltage Scanning Electron Microscope Using an Auger Electron Spectrometer

2019 ◽  
Vol 26 (4) ◽  
pp. 758-767 ◽  
Author(s):  
Yusuke Sakuda ◽  
Shunsuke Asahina ◽  
Takanari Togashi ◽  
Osamu Terasaki ◽  
Masato Kurihara
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Auger Electron ◽  
Low Voltage ◽  
Image Contrast ◽  
Electron Spectrometer ◽  
Voltage Scanning ◽  
Scanning Electron

Abstract

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