Ge+ ion extraction from a microwave ion source

1992 ◽  
Vol 63 (4) ◽  
pp. 2444-2446 ◽  
Author(s):  
N. Sakudo ◽  
T. Matsuo ◽  
T. Seki ◽  
H. Koike ◽  
Y. Usami
Keyword(s):  
Ion Source ◽  
Ion Extraction ◽  
Microwave Ion Source

scholarly journals Energy distribution of the compact microwave ion source for extremely low voltage ion extraction

2002 ◽  
Vol 73 (2) ◽  
pp. 758-760 ◽  
Author(s):  
Y. Gotoh ◽  
K. Nakajima ◽  
T. Hagiwara ◽  
H. Tsuji ◽  
J. Ishikawa
Keyword(s):  
Energy Distribution ◽  
Low Voltage ◽  
Ion Source ◽  
Ion Extraction ◽  
Microwave Ion Source

Development of microwave ion source for industrial applications

2014 ◽  
Vol 85 (2) ◽  
pp. 02C306 ◽  
Author(s):  
N. Takahashi ◽  
H. Murata ◽  
H. Mitsubori ◽  
J. Sakuraba ◽  
T. Soga ◽  
...  
Keyword(s):  
Industrial Applications ◽  
Ion Source ◽  
Microwave Ion Source

scholarly journals Development of new magnets for a microwave ion source

2018 ◽  
Author(s):  
Nobuaki Takahashi ◽  
Hirohiko Murata ◽  
Hitoshi Mitsubori ◽  
Tomohiro Soga ◽  
Yasushi Aoki ◽  
...  
Keyword(s):  
Ion Source ◽  
Microwave Ion Source

Minipermanent magnet high-current microwave ion source

2006 ◽  
Vol 77 (3) ◽  
pp. 03A305 ◽  
Author(s):  
Zhizhong Song ◽  
Shixiang Peng ◽  
Jinxiang Yu ◽  
Jianchuan Ming ◽  
Zhongxi Yuan ◽  
...  
Keyword(s):  
Ion Source ◽  
High Current ◽  
Microwave Ion Source

Procedure of Predicting the Lifetime of the Accelerating Electrode of an Ion-Extraction System of a Gas-Discharge Ion Source

2019 ◽  
Vol 13 (6) ◽  
pp. 1217-1224 ◽  
Author(s):  
R. V. Akhmetzhanov ◽  
Ye. V. Vorob’ev ◽  
D. V. Dukhopel’nikov ◽  
S. G. Ivakhnenko ◽  
V. A. Obukhov ◽  
...  
Keyword(s):  
Gas Discharge ◽  
Ion Source ◽  
Extraction System ◽  
Ion Extraction

Development and test of 2.45 GHz microwave ion source based intense ion beam experimental facility

Vacuum ◽  
2016 ◽  
Vol 124 ◽  
pp. 55-59 ◽  
Author(s):  
Narender Kumar ◽  
G. Rodrigues ◽  
Y. Mathur ◽  
S. Ojha ◽  
R. Ahuja ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Experimental Facility ◽  
Microwave Ion Source

scholarly journals Characteristics of a High Current Microwave Ion Source for Oxygen Ion Implanter.

Shinku ◽  
1999 ◽  
Vol 42 (7) ◽  
pp. 670-675 ◽  
Author(s):  
Takayoshi SEKI ◽  
Katsumi TOKIGUCHI
Keyword(s):  
Ion Source ◽  
High Current ◽  
Oxygen Ion ◽  
Microwave Ion Source
Sign in / Sign up

Export Citation Format

Share Document