Production of sheet plasma with dc magnetron discharge source

1992 ◽  
Vol 63 (1) ◽  
pp. 44-47 ◽  
Author(s):  
Yoshihiro Okuno ◽  
Hiroshi Ishikura ◽  
Hiroharu Fujita
Keyword(s):  
Magnetron Discharge ◽  
Discharge Source ◽  
Sheet Plasma

Advanced method of sheet plasma production.

Shinku ◽  
1985 ◽  
Vol 28 (8) ◽  
pp. 648-650
Author(s):  
Joshin URAMOTO
Keyword(s):  
Plasma Production ◽  
Advanced Method ◽  
Sheet Plasma

scholarly journals Current–voltage characteristics of an impulse magnetron discharge in target material vapor

2020 ◽  
Vol 1686 ◽  
pp. 012019
Author(s):  
Andrey V. Kaziev ◽  
Kseniia A. Leonova ◽  
Maksim M. Kharkov ◽  
Alexander V. Tumarkin ◽  
Dobrynya V. Kolodko ◽  
...  
Keyword(s):  
Target Material ◽  
Magnetron Discharge ◽  
Current Voltage ◽  
Current Voltage Characteristics

Principal Physics of Oblique Sputtering of Calcium Phosphate Coatings Using RF-Magnetron Discharge Plasma

2021 ◽  
Vol 63 (11) ◽  
pp. 1891-1897
Author(s):  
K. A. Prosolov ◽  
O. A. Belyavskaya ◽  
V. V. Lastovka ◽  
M. V. Chaikina ◽  
Yu. P. Sharkeev
Keyword(s):  
Calcium Phosphate ◽  
Discharge Plasma ◽  
Magnetron Discharge ◽  
Phosphate Coatings ◽  
Calcium Phosphate Coatings

Characteristics of extracted ion beam from a cesium-free negative ion source using sheet plasma

2020 ◽  
Vol 91 (11) ◽  
pp. 113302
Author(s):  
H. Kaminaga ◽  
T. Takimoto ◽  
A. Tonegawa ◽  
K. N. Sato
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Negative Ion ◽  
Sheet Plasma

Characterization of a Focal Plane Camera Fitted to a Mattauch−Herzog Geometry Mass Spectrograph. 1. Use with a Glow-Discharge Source

2002 ◽  
Vol 74 (20) ◽  
pp. 5327-5332 ◽  
Author(s):  
Barnes ◽  
Roger Sperline ◽  
M. Bonner Denton ◽  
Charles J. Barinaga ◽  
David Koppenaal ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Focal Plane ◽  
Discharge Source ◽  
Mass Spectrograph ◽  
Glow Discharge Source

Deuterium retention in mixed C–W–D films co-deposited in magnetron discharge in deuterium

2013 ◽  
Vol 438 (1-3) ◽  
pp. 204-208 ◽  
Author(s):  
S. Krat ◽  
Yu Gasparyan ◽  
V. Efimov ◽  
A. Mednikov ◽  
M. Zibrov ◽  
...  
Keyword(s):  
Magnetron Discharge ◽  
Deuterium Retention

Simplified cascaded arc discharge source for production of a processing plasma

1993 ◽  
Vol 64 (4) ◽  
pp. 990-995 ◽  
Author(s):  
Yoshihiro Okuno ◽  
Shinya Yagura ◽  
Hiroshi Ishikura ◽  
Hiroharu Fujita
Keyword(s):  
Arc Discharge ◽  
Discharge Source
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