Application of the Child-Langmuir law to magnetron discharge plasmas

1994 ◽  
Vol 22 (4) ◽  
pp. 442-448 ◽  
Author(s):  
K. Kuwahara ◽  
H. Fujiyama
Keyword(s):  
Magnetron Discharge ◽  
Discharge Plasmas

ACTIVE AND PASSIVE SPECTROSCOPY ON EUV-PRODUCING DISCHARGE PLASMAS

2004 ◽  
Vol 8 (1) ◽  
pp. 149-160
Author(s):  
E.R. Kieft ◽  
Joost van der Mullen ◽  
G.M.W. Kroesen ◽  
V. Banine ◽  
K.N. Koshelev
Keyword(s):  
Discharge Plasmas

Self-Adjusting Characterization for Steady-State, Direct Current Cathode-Dominated Glow Discharge Plasmas at High Pressures

2013 ◽  
Vol 30 (8) ◽  
pp. 085201 ◽  
Author(s):  
Fang Ding ◽  
Shi-Jian Zheng ◽  
Bo Ke ◽  
Zhong-Liang Tang ◽  
Yi-Chuan Zhang ◽  
...  
Keyword(s):  
Steady State ◽  
Glow Discharge ◽  
Direct Current ◽  
High Pressures ◽  
Discharge Plasmas

scholarly journals Current–voltage characteristics of an impulse magnetron discharge in target material vapor

2020 ◽  
Vol 1686 ◽  
pp. 012019
Author(s):  
Andrey V. Kaziev ◽  
Kseniia A. Leonova ◽  
Maksim M. Kharkov ◽  
Alexander V. Tumarkin ◽  
Dobrynya V. Kolodko ◽  
...  
Keyword(s):  
Target Material ◽  
Magnetron Discharge ◽  
Current Voltage ◽  
Current Voltage Characteristics

Principal Physics of Oblique Sputtering of Calcium Phosphate Coatings Using RF-Magnetron Discharge Plasma

2021 ◽  
Vol 63 (11) ◽  
pp. 1891-1897
Author(s):  
K. A. Prosolov ◽  
O. A. Belyavskaya ◽  
V. V. Lastovka ◽  
M. V. Chaikina ◽  
Yu. P. Sharkeev
Keyword(s):  
Calcium Phosphate ◽  
Discharge Plasma ◽  
Magnetron Discharge ◽  
Phosphate Coatings ◽  
Calcium Phosphate Coatings

Abatement of gas-phase VOCs via dielectric barrier discharge plasmas

2021 ◽  
Author(s):  
Pranita Panda ◽  
Rajesh Kumar Mahanta ◽  
Suchitra Mohanty ◽  
Rita Paikaray ◽  
Smruti Prava Das
Keyword(s):  
Gas Phase ◽  
Dielectric Barrier Discharge ◽  
Barrier Discharge ◽  
Dielectric Barrier ◽  
Discharge Plasmas

Deuterium retention in mixed C–W–D films co-deposited in magnetron discharge in deuterium

2013 ◽  
Vol 438 (1-3) ◽  
pp. 204-208 ◽  
Author(s):  
S. Krat ◽  
Yu Gasparyan ◽  
V. Efimov ◽  
A. Mednikov ◽  
M. Zibrov ◽  
...  
Keyword(s):  
Magnetron Discharge ◽  
Deuterium Retention

Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas

2015 ◽  
Vol 17 (3) ◽  
pp. 191-195 ◽  
Author(s):  
Zhan WANG ◽  
Wei GAO ◽  
Peng ZHANG ◽  
Huijie YAN ◽  
Chunsheng REN
Keyword(s):  
Discharge Plasmas
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