Emissive probe measurement of electron temperature in high‐pressure plasmas (≥1 mTorr)

1988 ◽  
Vol 59 (9) ◽  
pp. 2002-2007 ◽  
Author(s):  
Haruo Shindo ◽  
Masayoshi Konishi ◽  
Takeshi Tamaru
Keyword(s):  
High Pressure ◽  
Electron Temperature ◽  
Probe Measurement ◽  
Emissive Probe

Emissive probe measurement of electron temperature in recombining plasma produced in the linear divertor simulator TPD-II

2003 ◽  
Vol 313-316 ◽  
pp. 720-724 ◽  
Author(s):  
Akihiro Matsubara ◽  
Tatsunori Sugimoto ◽  
Takehisa Shibuya ◽  
Kazutaka Kawamura ◽  
Shigeru Sudo ◽  
...  
Keyword(s):  
Electron Temperature ◽  
Probe Measurement ◽  
Emissive Probe

scholarly journals Spatial Temperature Profile in a Magnetised Capacitively Coupled Discharge

2018 ◽  
Vol 16 (6) ◽  
pp. 385-390
Author(s):  
Shikha BINWAL ◽  
Jay K JOSHI ◽  
Shantanu Kumar KARKARI ◽  
Predhiman Krishan KAW ◽  
Lekha NAIR ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Electron Temperature ◽  
Temperature Profile ◽  
Transverse Magnetic ◽  
Capacitively Coupled ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Higher Temperature ◽  
The Magnetic Field ◽  
Emissive Probe

A floating emissive probe has been used to obtain the spatial electron temperature (Te) profile in a 13.56 MHz parallel plate capacitive coupled plasma. The effect of an external transverse magnetic field and pressure on the electron temperature profile has been discussed. In the un-magnetised case, the bulk region of the plasma has a uniform Te. Upon application of the magnetic field, the Te profile becomes non-uniform and skewed.  With increase in pressure, there is an overall reduction in electron temperature. The regions adjacent to the electrodes witnessed a higher temperature than the bulk for both cases. The emissive probe results have also been compared with particle-in-cell simulation results for the un-magnetised case.

A Stark broadening method to determine simultaneously the electron temperature and density in high-pressure microwave plasmas

2007 ◽  
Vol 40 (19) ◽  
pp. 5929-5936 ◽  
Author(s):  
J Torres ◽  
J M Palomares ◽  
A Sola ◽  
J J A M van der Mullen ◽  
A Gamero
Keyword(s):  
High Pressure ◽  
Electron Temperature ◽  
Stark Broadening ◽  
Microwave Plasmas
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