Stress effects in thermal cycling of copper (magnesium) thin films

1995 ◽  
Vol 66 (16) ◽  
pp. 2074-2076 ◽  
Author(s):  
J. J. Toomey ◽  
S. Hymes ◽  
S. P. Murarka
2006 ◽  
Vol 88 (25) ◽  
pp. 252901 ◽  
Author(s):  
Jyrki Lappalainen ◽  
Vilho Lantto ◽  
Johannes Frantti ◽  
Jussi Hiltunen

1994 ◽  
Vol 356 ◽  
Author(s):  
S. Y. Tam ◽  
L. E. Scriven ◽  
H. K. Stolarski

AbstractA model is developed to predict the magnitude and pattern of stress due to drying of polymer films. This model combines diffusion-and-convection equation with large deformation elasto-viscoplasticity, utilizing concentration dependent elastic and viscoplastic material properties to better represent the behavior of drying thin films.The results show that the highest stress occurs at film surface where the concentration depletion is the highest. The magnitude of this stress is induced by increasing mass transfer across the film surface but reduced by increasing diffusion coefficient. The edge effect is significant but local, limited to about four film thicknesses. Similarly, change in substrate induces extra stress.


1981 ◽  
Vol 23 (7) ◽  
pp. 3149-3158 ◽  
Author(s):  
C. A. Pelá ◽  
J. F. Suassuna ◽  
G. E. Barberis ◽  
C. Rettori

1993 ◽  
Vol 308 ◽  
Author(s):  
S.G.H. Anderson ◽  
I.-S. Yeo ◽  
P.S. Ho ◽  
S. Ramaswami ◽  
R. Cheung

ABSTRACTWafer curvature measurements of a trilayer (SiO2 / AlSiCu / Si) structure are compared to that predicted by a weighted sum of individual measurements of SiO2 and AlSiCu films on Si, and significant differences are found to exist for temperatures above 200°C. A straightforward analysis of the stresses in each layer has been modeled using an extension of a model by Feng et al. which assumes uniform plastic deformation throughout the Al. The modeling results suggest a straightforeward method for determining stresses in deformable thin films that are confined by elastic overlayers. A comparison of the stress-temperature behavior for unpassivated and passivated AlSiCu films reveals that the confined films exhibit less plastic deformation and both higher tension and compression during thermal cycling.


2018 ◽  
Vol 9 (27) ◽  
pp. 3820-3831 ◽  
Author(s):  
Hui-Ching Hsieh ◽  
Chih-Chien Hung ◽  
Kodai Watanabe ◽  
Jung-Yao Chen ◽  
Yu-Cheng Chiu ◽  
...  

Novel deformable and fluorescent PF-b-PBA copolymers with nanofibrillar structures were synthesized for unraveling strain-dependent optical properties.


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