Surface‐acoustic‐wave film thickness monitor

1977 ◽  
Vol 48 (7) ◽  
pp. 920-922 ◽  
Author(s):  
S. Kovnovich ◽  
E. Harnik
Keyword(s):  
Acoustic Wave ◽  
Film Thickness ◽  
Surface Acoustic Wave

ZnO film thickness effect on surface acoustic wave modes and acoustic streaming

2008 ◽  
Vol 93 (9) ◽  
pp. 094105 ◽  
Author(s):  
X. Y. Du ◽  
Y. Q. Fu ◽  
S. C. Tan ◽  
J. K. Luo ◽  
A. J. Flewitt ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Film Thickness ◽  
Surface Acoustic Wave ◽  
Acoustic Streaming ◽  
Thickness Effect ◽  
Zno Film ◽  
Wave Modes

The Characterization of Surface Acoustic Wave Modes on Rotated Y-Cut Quartz (ST-X Quartz) with Different AlN Film Thickness

2001 ◽  
Vol 40 (Part 1, No. 7) ◽  
pp. 4590-4592 ◽  
Author(s):  
Maw-Shung Lee ◽  
Feng-Chih Chang ◽  
Sean Wu ◽  
Long Wu
Keyword(s):  
Acoustic Wave ◽  
Film Thickness ◽  
Surface Acoustic Wave ◽  
Aln Film ◽  
Wave Modes

STUDY OF DEFECTS IN a-Ge AND a-GeHxUSING SURFACE ACOUSTIC WAVE TECHNIQUE

1981 ◽  
Vol 42 (C4) ◽  
pp. C4-365-C4-368
Author(s):  
K. L. Bhatia ◽  
M.v. Haumeder ◽  
S. Hunklinger
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Wave Technique
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