High temperature electron cyclotron resonance etching of GaN, InN, and AlN

1995 ◽  
Vol 66 (14) ◽  
pp. 1761-1763 ◽  
Author(s):  
R. J. Shul ◽  
S. P. Kilcoyne ◽  
M. Hagerott Crawford ◽  
J. E. Parmeter ◽  
C. B. Vartuli ◽  
...  
Keyword(s):  
High Temperature ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Temperature Electron

Development of a high-temperature oven for the 28 GHz electron cyclotron resonance ion source

2014 ◽  
Vol 85 (2) ◽  
pp. 02A941 ◽  
Author(s):  
J. Ohnishi ◽  
Y. Higurashi ◽  
M. Kidera ◽  
K. Ozeki ◽  
T. Nakagawa
Keyword(s):  
High Temperature ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Source ◽  
Electron Cyclotron

A room temperature electron cyclotron resonance ion source for the DC-110 cyclotron

2014 ◽  
Vol 85 (2) ◽  
pp. 02A933
Author(s):  
A. Efremov ◽  
S. Bogomolov ◽  
A. Lebedev ◽  
V. Loginov ◽  
N. Yazvitsky
Keyword(s):  
Cyclotron Resonance ◽  
Room Temperature ◽  
Electron Cyclotron Resonance ◽  
Ion Source ◽  
Electron Cyclotron ◽  
Temperature Electron
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