Behavior and mechanism of step bunching during metalorganic vapor phase epitaxy of GaAs

Masanori Shinohara; Naohisa Inoue

doi:10.1063/1.113282

Behavior and mechanism of step bunching during metalorganic vapor phase epitaxy of GaAs

Applied Physics Letters ◽

10.1063/1.113282 ◽

1995 ◽

Vol 66 (15) ◽

pp. 1936-1938 ◽

Cited By ~ 57

Author(s):

Masanori Shinohara ◽

Naohisa Inoue

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Step Bunching

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Surface‐diffusion and step‐bunching mechanisms of metalorganic vapor‐phase epitaxy studied by high‐vacuum scanning tunneling microscopy

Journal of Applied Physics ◽

10.1063/1.360053 ◽

1995 ◽

Vol 78 (5) ◽

pp. 3026-3035 ◽

Cited By ~ 55

Author(s):

Makoto Kasu ◽

Naoki Kobayashi

Keyword(s):

Scanning Tunneling Microscopy ◽

Surface Diffusion ◽

Vapor Phase ◽

High Vacuum ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Scanning Tunneling ◽

Tunneling Microscopy ◽

Step Bunching

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Step bunching on {111} facets in the selective growth of GaAs by metalorganic vapor phase epitaxy

Journal of Applied Physics ◽

10.1063/1.360088 ◽

1995 ◽

Vol 78 (4) ◽

pp. 2854-2856 ◽

Cited By ~ 4

Author(s):

Toshio Nishida ◽

Masanori Shinohara ◽

Naohisa Inoue

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Selective Growth ◽

Step Bunching

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Erratum: ‘‘Surface‐diffusion and step‐bunching mechanisms of metalorganic vapor‐phase epitaxy studied by high‐vacuum scanning tunneling microscopy’’ [J. Appl. Phys. 78, 3026 (1995)]

Journal of Applied Physics ◽

10.1063/1.362716 ◽

1996 ◽

Vol 79 (3) ◽

pp. 1822-1823 ◽

Cited By ~ 3

Author(s):

Makoto Kasu ◽

Naoki Kobayashi

Keyword(s):

Scanning Tunneling Microscopy ◽

Surface Diffusion ◽

Vapor Phase ◽

High Vacuum ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Scanning Tunneling ◽

Tunneling Microscopy ◽

Step Bunching

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Simulation and Observation of the Step Bunching Process Grown on GaAs (001) Vicinal Surface by Metalorganic Vapor Phase Epitaxy

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.1280 ◽

1996 ◽

Vol 35 (Part 1, No. 2B) ◽

pp. 1280-1284 ◽

Cited By ~ 45

Author(s):

Jun-ya Ishizaki ◽

Kazunobu Ohkuri ◽

Takashi Fukui

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Vicinal Surface ◽

Step Bunching

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Theory and experiment of step bunching on misoriented GaAs(001) during metalorganic vapor-phase epitaxy

Applied Physics Letters ◽

10.1063/1.2832370 ◽

2008 ◽

Vol 92 (1) ◽

pp. 013117 ◽

Cited By ~ 26

Author(s):

A. L.-S. Chua ◽

E. Pelucchi ◽

A. Rudra ◽

B. Dwir ◽

E. Kapon ◽

...

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Step Bunching ◽

Theory And Experiment

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Effect of strained InGaAs step bunching on mobility and device performance in n-InGaP/InGaAs/GaAs pseudomorphic heterostructures grown by metalorganic vapor phase epitaxy

Journal of Crystal Growth ◽

10.1016/0022-0248(94)91145-2 ◽

1994 ◽

Vol 145 (1-4) ◽

pp. 799-807 ◽

Cited By ~ 12

Author(s):

T. Kikkawa ◽

K. Makiyama ◽

H. Ochimizu ◽

K. Kasai ◽

J. Komeno

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Device Performance ◽

Step Bunching

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Simulation and Observation of the Step Bunching Process Grown on GaAs (001) Vicinal Surface by Metalorganic Vapor Phase Epitaxy

10.7567/ssdm.1995.d-8-2 ◽

1995 ◽

Author(s):

J. Ishizaki ◽

K. Ohkuri ◽

T. Fukui

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Vicinal Surface ◽

Step Bunching

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Step-bunching in (Al Ga1−)0.5In0.5P layers on misoriented (001) GaAs substrates grown by metalorganic vapor phase epitaxy

Journal of Crystal Growth ◽

10.1016/0022-0248(94)91039-1 ◽

1994 ◽

Vol 145 (1-4) ◽

pp. 126-132 ◽

Cited By ~ 20

Author(s):

A. Gomyo ◽

H. Hotta ◽

F. Miyasaka ◽

K. Tada ◽

H. Fujii ◽

...

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Step Bunching ◽

Gaas Substrates

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Density functional theory study on surface adsorptions in AlN metalorganic vapor phase epitaxy process

Applied Surface Science ◽

10.1016/j.apsusc.2020.148773 ◽

2021 ◽

Vol 544 ◽

pp. 148773

Author(s):

Peng Lin ◽

Nannan Niu ◽

Ran Zuo ◽

Yulong Fang ◽

Zhihong Feng

Keyword(s):

Density Functional Theory ◽

Vapor Phase ◽

Density Functional ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Density Functional Theory Study ◽

Functional Theory

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Selective-area growth and characterization of cubic GaN grown by metalorganic vapor phase epitaxy

Thin Solid Films ◽

10.1016/j.tsf.2020.138125 ◽

2020 ◽

Vol 709 ◽

pp. 138125

Author(s):

Pattana Suwanyangyaun ◽

Sakuntam Sanorpim ◽

Kentaro Onabe

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Cubic Gan

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