Two‐dimensional model of ion dynamics during plasma source ion implantation
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1999 ◽
Vol 27
(5)
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pp. 1317-1328
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Keyword(s):
2003 ◽
Vol 171
(1-3)
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pp. 119-123
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2002 ◽
Vol 61
(1)
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pp. 34-44
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