Model for the vaporization of mixed organometallic compounds in the metalorganic chemical vapor deposition of high temperature superconducting films

Guangyao Meng; Gang Zhou; Roger L. Schneider; Bimal K. Sarma; Moises Levy

doi:10.1063/1.110621

Model for the vaporization of mixed organometallic compounds in the metalorganic chemical vapor deposition of high temperature superconducting films

Applied Physics Letters ◽

10.1063/1.110621 ◽

1993 ◽

Vol 63 (14) ◽

pp. 1981-1983 ◽

Cited By ~ 18

Author(s):

Guangyao Meng ◽

Gang Zhou ◽

Roger L. Schneider ◽

Bimal K. Sarma ◽

Moises Levy

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Organometallic Compounds ◽

Superconducting Films ◽

High Temperature Superconducting ◽

Metalorganic Chemical

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Reduced thermal budget processing of Y–Ba–Cu–O high temperature superconducting thin films by metalorganic chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577421 ◽

1991 ◽

Vol 9 (3) ◽

pp. 401-404 ◽

Cited By ~ 8

Author(s):

R. Singh ◽

S. Sinha ◽

N. J. Hsu ◽

J. T. C. Ng ◽

P. Chou ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Thin Films ◽

Thermal Budget ◽

High Temperature Superconducting ◽

Metalorganic Chemical

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Plasma-Enhanced Metalorganic Chemical Vapor Deposition for High Temperature Superconducting Thin Film

Materials Science Forum ◽

10.4028/www.scientific.net/msf.140-142.457 ◽

1993 ◽

Vol 140-142 ◽

pp. 457-464

Author(s):

Kenji Ebihara ◽

Tomoaki Ikegami

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Thin Film ◽

High Temperature Superconducting ◽

Metalorganic Chemical

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A Review of Metalorganic Chemical Vapor Deposition of High-Temperature Superconducting Thin Films

10.1117/12.965153 ◽

1990 ◽

Cited By ~ 10

Author(s):

A. Erbil ◽

K. Zhang ◽

B. S. Kwak ◽

E. P. Boyd

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Thin Films ◽

High Temperature Superconducting ◽

Metalorganic Chemical

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Heteroepitaxial AlN growth 4on c-plane sapphire substrates by ammonia-free high temperature metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2021.126496 ◽

2022 ◽

pp. 126496

Author(s):

Xu-Qiang Shen ◽

Kazutoshi Kojima

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Sapphire Substrates ◽

Metalorganic Chemical

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Preparation of ultrathin Bi‐Sr‐Ca‐Cu‐O superconducting films by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.104385 ◽

1991 ◽

Vol 58 (10) ◽

pp. 1103-1105 ◽

Cited By ~ 18

Author(s):

Tsunemi Sugimoto ◽

Masaji Yoshida ◽

Kazushi Sugawara ◽

Yuh Shiohara ◽

Shoji Tanaka

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Films ◽

Metalorganic Chemical

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Fabrication of AlN Nano-Structures Using Polarity Control by High Temperature Metalorganic Chemical Vapor Deposition

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2015.10368 ◽

2015 ◽

Vol 15 (7) ◽

pp. 5144-5147 ◽

Cited By ~ 8

Author(s):

Daeyong Eom ◽

Jinwan Kim ◽

Kyungjae Lee ◽

Minhwan Jeon ◽

Cheon Heo ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Nano Structures ◽

Metalorganic Chemical

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High Quality Al-Polar AlN Growth on (0001) Sapphire Using Polarity-Selective Thermal Etching by High Temperature Metalorganic Chemical Vapor Deposition

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2015.11446 ◽

2015 ◽

Vol 15 (11) ◽

pp. 8401-8406

Author(s):

Minhwan Jeon ◽

Jinwan Kim ◽

Kyungjae Lee ◽

Daeyong Eom ◽

Jaedo Pyeon ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

High Quality ◽

Thermal Etching ◽

Metalorganic Chemical

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Effect of high-temperature buffer thickness on quality of AlN epilayer grown on sapphire substrate by metalorganic chemical vapor deposition

Chinese Physics B ◽

10.1088/1674-1056/22/5/057105 ◽

2013 ◽

Vol 22 (5) ◽

pp. 057105 ◽

Cited By ~ 4

Author(s):

Bo Liu ◽

Sen Zhang ◽

Jia-Yun Yin ◽

Xiong-Wen Zhang ◽

Shao-Bo Dun ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Sapphire Substrate ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metalorganic Chemical

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Initial stage of epitaxial growth at the high temperature of GaAs and AlGaAs on Si by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.104354 ◽

1991 ◽

Vol 58 (11) ◽

pp. 1170-1172 ◽

Cited By ~ 14

Author(s):

T. Soga ◽

T. George ◽

T. Jimbo ◽

M. Umeno ◽

E. R. Weber

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Initial Stage ◽

Metalorganic Chemical

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Ultraviolet spectra of II–VI organometallic compounds and their application to in situ measurements of the photolysis in a metalorganic chemical vapor deposition reactor

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576111 ◽

1989 ◽

Vol 7 (2) ◽

pp. 276-280 ◽

Cited By ~ 21

Author(s):

Y. Fujita ◽

S. Fujii ◽

T. Iuchi

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Organometallic Compounds ◽

In Situ Measurements ◽

Chemical Vapor Deposition Reactor ◽

Ultraviolet Spectra ◽

Metalorganic Chemical

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