Initial stage of epitaxial growth at the high temperature of GaAs and AlGaAs on Si by metalorganic chemical vapor deposition

1991 ◽  
Vol 58 (11) ◽  
pp. 1170-1172 ◽  
Author(s):  
T. Soga ◽  
T. George ◽  
T. Jimbo ◽  
M. Umeno ◽  
E. R. Weber
Keyword(s):  
Chemical Vapor Deposition ◽  
High Temperature ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Initial Stage ◽  
Metalorganic Chemical

Hetero-Epitaxial Growth of ZnO Film by Temperature-Modulated Metalorganic Chemical Vapor Deposition

2009 ◽  
Vol 2 ◽  
pp. 045502 ◽  
Author(s):  
Eiji Fujimoto ◽  
Masatomo Sumiya ◽  
Tsuyoshi Ohnishi ◽  
Kenji Watanabe ◽  
Mikk Lippmaa ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Film ◽  
Metalorganic Chemical

Effect of VI/II Gas Ratio on the Epitaxial Growth of ZnO Films by Metalorganic Chemical Vapor Deposition

2011 ◽  
Vol 50 (10R) ◽  
pp. 105502 ◽  
Author(s):  
Yong-Seok Choi ◽  
Dae-Kue Hwang ◽  
Bong-Joon Kwon ◽  
Jang-Won Kang ◽  
Yong-Hoon Cho ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Films ◽  
Gas Ratio ◽  
Metalorganic Chemical
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