Ultraviolet photon induced stimulation of surface reaction during growth of hydrogenated amorphous silicon: Estimation of the lifetime of film precursors

1993 ◽  
Vol 63 (20) ◽  
pp. 2806-2808 ◽  
Author(s):  
Atsushi Suzuki ◽  
Gautam Ganguly ◽  
Akihisa Matsuda
Keyword(s):  
Amorphous Silicon ◽  
Surface Reaction ◽  
Hydrogenated Amorphous Silicon ◽  
Hydrogenated Amorphous ◽  
Stimulation Of

Light-addressable electrode with hydrogenated amorphous silicon and low-conductive passivation layer for stimulation of cultured neurons

2007 ◽  
Vol 90 (9) ◽  
pp. 093901 ◽  
Author(s):  
Jun Suzurikawa ◽  
Hirokazu Takahashi ◽  
Ryohei Kanzaki ◽  
Masayuki Nakao ◽  
Yuzo Takayama ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Passivation Layer ◽  
Cultured Neurons ◽  
Hydrogenated Amorphous ◽  
Stimulation Of

BONDING IN HYDROGENATED AMORPHOUS SILICON

1981 ◽  
Vol 42 (C4) ◽  
pp. C4-773-C4-777 ◽  
Author(s):  
H. R. Shanks ◽  
F. R. Jeffrey ◽  
M. E. Lowry
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Hydrogenated Amorphous

High Rate Deposition of Stable Hydrogenated Amorphous Silicon in Transition from Amorphous to Microcrystalline Silicon

2003 ◽  
Vol 762 ◽  
Author(s):  
Guofu Hou ◽  
Xinhua Geng ◽  
Xiaodan Zhang ◽  
Ying Zhao ◽  
Junming Xue ◽  
...  
Keyword(s):  
Phase Transition ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
High Rate ◽  
Very High Frequency ◽  
High Quality ◽  
Working Pressure ◽  
Hydrogen Dilution ◽  
Hydrogenated Amorphous

AbstractHigh rate deposition of high quality and stable hydrogenated amorphous silicon (a-Si:H) films were performed near the threshold of amorphous to microcrystalline phase transition using a very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of hydrogen dilution on optic-electronic and structural properties of these films was investigated by Fourier-transform infrared (FTIR) spectroscopy, Raman scattering and constant photocurrent method (CPM). Experiment showed that although the phase transition was much influenced by hydrogen dilution, it also strongly depended on substrate temperature, working pressure and plasma power. With optimized condition high quality and high stable a-Si:H films, which exhibit σph/σd of 4.4×106 and deposition rate of 28.8Å/s, have been obtained.

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