Determination of silicon point defect properties from oxidation enhanced diffusion of buried layers
2014 ◽
Vol 49
(2)
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pp. 43-49
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1999 ◽
Vol 48
(4)
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pp. 323-332
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Keyword(s):
1999 ◽
Vol 2
(03)
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pp. 303-309
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Keyword(s):
Keyword(s):
2005 ◽
Vol 85
(4-7)
◽
pp. 569-575
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