Low‐temperature deposition of ferroelectric Bi4Ti3O12films by the reactive ionized cluster beam method

1993 ◽  
Vol 63 (8) ◽  
pp. 1050-1052 ◽  
Author(s):  
Norio Kaneko ◽  
Keisuke Yamamoto ◽  
Takeo Tsukamoto
Keyword(s):  
Low Temperature ◽  
Cluster Beam ◽  
Low Temperature Deposition ◽  
Beam Method ◽  
Temperature Deposition

Low-temperature fabrication of high-quality (Ba, Sr)TiO3 films using charged liquid cluster beam method

2002 ◽  
Vol 17 (8) ◽  
pp. 1888-1891 ◽  
Author(s):  
Hyungsoo Choi ◽  
Sungho Park ◽  
Yi Yang ◽  
HoChul Kang ◽  
Kyekyoon (Kevin) Kim ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Low Temperature ◽  
Cluster Beam ◽  
High Quality ◽  
Carboxylate Ligands ◽  
Si Substrates ◽  
Beam Method ◽  
Temperature Deposition ◽  
Bst Films ◽  
Substrate Temperatures

Low-temperature deposition of high-quality (Ba, Sr)TiO3 (BST) thin films was achieved in air on Pt/Ti/SiO2/Si substrates using the charged liquid cluster beam (CLCB) method. The Ba, Sr, and Ti precursors were synthesized using alkoxy carboxylate ligands to tailor their physical properties to the CLCB process. The as-deposited BST films fabricated at substrate temperatures as low as 280 °C exhibited high purity. The leakage current density and dielectric constant of the film, deposited at 300 °C and subsequently annealed at 700 °C, were 2.5 × 10−9 A/cm2 at 1.5 V and 305, respectively.

Low-temperature deposition of highly [100]-oriented MgO films using charged liquid cluster beam

2001 ◽  
Vol 396 (1-2) ◽  
pp. 23-28 ◽  
Author(s):  
S.H Rhee ◽  
Y Yang ◽  
H.S Choi ◽  
J.M Myoung ◽  
K Kim
Keyword(s):  
Low Temperature ◽  
Cluster Beam ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Low-Temperature Deposition of CuIn(SxSe1-x)2Thin Films by Ionized Cluster Beam Technique

1998 ◽  
Vol 37 (Part 1, No. 4A) ◽  
pp. 1760-1763 ◽  
Author(s):  
Hiroyuki Sano ◽  
Hiroshi Hirasawa ◽  
Susumu Nakamura ◽  
Kenichi Kondo ◽  
Katsuaki Sato
Keyword(s):  
Low Temperature ◽  
Cluster Beam ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Beam Technique

Fabrication of Chitosan-nanohydroxyapatite Scaffolds via Low-temperature Deposition Manufacturing

2011 ◽  
Vol 26 (1) ◽  
pp. 12-16 ◽  
Author(s):  
Xiong-Fei ZHENG ◽  
Wen-Jie ZHAI ◽  
Ying-Chun LIANG ◽  
Tao SUN
Keyword(s):  
Low Temperature ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Low temperature deposition of BiFeO3 films on Ti foils for piezoelectric applications

2021 ◽  
Vol 204 ◽  
pp. 114152
Author(s):  
Jing Yan ◽  
Jun Ouyang ◽  
Hongbo Cheng ◽  
Peng Yan
Keyword(s):  
Low Temperature ◽  
Low Temperature Deposition ◽  
Temperature Deposition

Low‐temperature deposition of Y‐Ba‐Cu‐O films on a CaF2/GaAs substrate

1989 ◽  
Vol 54 (4) ◽  
pp. 383-385 ◽  
Author(s):  
K. Mizuno ◽  
M. Miyauchi ◽  
K. Setsune ◽  
K. Wasa
Keyword(s):  
Low Temperature ◽  
Gaas Substrate ◽  
Low Temperature Deposition ◽  
Temperature Deposition
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