Fabrication of high aspect ratio silicon pillars of <10 nm diameter

Wei Chen; Haroon Ahmed

doi:10.1063/1.109798

Fabrication of high aspect ratio silicon pillars of <10 nm diameter

Applied Physics Letters ◽

10.1063/1.109798 ◽

1993 ◽

Vol 63 (8) ◽

pp. 1116-1118 ◽

Cited By ~ 77

Author(s):

Wei Chen ◽

Haroon Ahmed

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Silicon Pillars

Download Full-text

Effect of oxygen plasma cleaning on nonswitching pseudo-Bosch etching of high aspect ratio silicon pillars

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.5122822 ◽

2020 ◽

Vol 38 (1) ◽

pp. 012804

Author(s):

Ferhat Aydinoglu ◽

Aixi Pan ◽

Chenxu Zhu ◽

Bo Cui

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Oxygen Plasma ◽

Plasma Cleaning ◽

Effect Of Oxygen ◽

Silicon Pillars

Download Full-text

Sub-50 nm High Aspect-Ratio Silicon Pillars, Ridges and Trenches Fabricated Using Ultra-High E-Beam Lithography and RIE

10.7567/ssdm.1992.pd3-8 ◽

1992 ◽

Author(s):

P. B. Fischer ◽

S. Y. Chou

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Silicon Pillars

Download Full-text

High aspect ratio silicon pillars fabricated by electrochemical etching and oxidation of macroporous silicon

Thin Solid Films ◽

10.1016/0040-6090(95)08042-2 ◽

1996 ◽

Vol 276 (1-2) ◽

pp. 29-31 ◽

Cited By ~ 13

Author(s):

H.W Lau ◽

G.J Parker ◽

R Greef

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Electrochemical Etching ◽

Macroporous Silicon ◽

Silicon Pillars

Download Full-text

Utilization of Direct Write Lithography to Develop Ultra High Aspect Ratio (>100:1) DRIE Silicon Pillars

2010 18th Biennial University/Government/Industry Micro/Nano Symposium ◽

10.1109/ugim.2010.5508920 ◽

2010 ◽

Author(s):

Julia Aebersold ◽

Kevin Walsh ◽

Michael Beggans

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Direct Write ◽

Silicon Pillars

Download Full-text

High aspect ratio submicron silicon pillars fabricated by photoassisted electrochemical etching and oxidation

Applied Physics Letters ◽

10.1063/1.114362 ◽

1995 ◽

Vol 67 (13) ◽

pp. 1877-1879 ◽

Cited By ~ 34

Author(s):

H. W. Lau ◽

G. J. Parker ◽

R. Greef ◽

M. Hölling

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Electrochemical Etching ◽

Silicon Pillars

Download Full-text

Sub‐50 nm high aspect‐ratio silicon pillars, ridges, and trenches fabricated using ultrahigh resolution electron beam lithography and reactive ion etching

Applied Physics Letters ◽

10.1063/1.108696 ◽

1993 ◽

Vol 62 (12) ◽

pp. 1414-1416 ◽

Cited By ~ 35

Author(s):

P. B. Fischer ◽

S. Y. Chou

Keyword(s):

Electron Beam ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Electron Beam Lithography ◽

Reactive Ion Etching ◽

Ultrahigh Resolution ◽

Ion Etching ◽

Resolution Electron ◽

Silicon Pillars

Download Full-text

FORMATION OF THICK HIGH-ASPECT-RATIO RESISTIVE MASKS BY THE CONTACT PHOTOLITHOGRAPHY METHOD

Автометрия ◽

10.15372/aut20180202 ◽

2018 ◽

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio

Download Full-text

Low and heat transfer in a high-aspect-ratio rib-roughed cooling channel with longitudinal intersecting ribs

Прикладная механика и техническая физика ◽

10.15372/pmtf20180414 ◽

2018 ◽

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Cooling Channel

Download Full-text

HEAT TRANSFER IN A FLAT CHANNEL WITH HIGH ASPECT RATIO AT A HEAT CARRIER FLOW WITH LOW-PRANDTL NUMBER

10.1615/ihtc16.cov.022710 ◽

2018 ◽

Author(s):

Viktor S. Naumkin ◽

O.V. Vitovsky ◽

Maksim S. Makarov ◽

V. E. Nakoryakov

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

Prandtl Number ◽

Heat Carrier ◽

High Aspect Ratio ◽

Flat Channel ◽

Carrier Flow

Download Full-text

HEAT TRANSFER AND PRESSURE LOSS PERFORMANCE FOR FAMILIES OF PARTIAL LENGTH PIN FIN ARRAYS IN HIGH ASPECT RATIO RECTANGULAR DUCTS

Proceeding of International Heat Transfer Conference 8 ◽

10.1615/ihtc8.1470 ◽

1986 ◽

Cited By ~ 4

Author(s):

G. D. Steuber ◽

D. E. Metzger

Keyword(s):

Heat Transfer ◽

Aspect Ratio ◽

High Aspect Ratio ◽

Pressure Loss ◽

Pin Fin ◽

Partial Length ◽

Pin Fin Arrays

Download Full-text