Influence of oxygen incorporation on the properties of magnetron sputtered hydrogenated amorphous germanium films

1993 ◽  
Vol 62 (16) ◽  
pp. 1961-1963 ◽  
Author(s):  
B. Schröder ◽  
A. Annen ◽  
T. Drüsedau ◽  
H. Freistedt ◽  
P. Deák ◽  
...  
1990 ◽  
Vol 192 ◽  
Author(s):  
W. Beyer ◽  
J. Herion ◽  
H. Wagner ◽  
U. Zastrow

ABSTRACTThe thermal stability of hydrogen in hydrogenated amorphous germanium films was studied by hydrogen evolution and by deuterium and hydrogen inter-diffusion experiments. Similar to a-Si:H, the hydrogen stability in a-Ge:H is found to depend strongly on the film structure and on the position of the Fermi level.


2011 ◽  
Vol 32 (11) ◽  
pp. 1165-1170 ◽  
Author(s):  
李悰 LI Cong ◽  
徐骏 XU Jun ◽  
林涛 LIN Tao ◽  
李伟 LI Wei ◽  
李淑鑫 LI Shu-xin ◽  
...  

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