New method to improve the adhesion strength of tungsten thin film on silicon by W2N glue layer
Keyword(s):
2006 ◽
Vol 352
(9-20)
◽
pp. 955-958
◽
1991 ◽
Vol 36
(5-6)
◽
pp. 763-771
◽
2000 ◽
Vol 66
(644)
◽
pp. 698-705
◽
2006 ◽
Vol 2006
(0)
◽
pp. 195-196
2019 ◽
Vol 2019
(0)
◽
pp. OS1409
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