Heavy arsenic doping of silicon grown by atmospheric‐pressure chemical vapor deposition at low temperatures
1993 ◽
Vol 140
(9)
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pp. 2703-2709
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Keyword(s):
1992 ◽
Vol 10
(4)
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pp. 1913-1919
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Keyword(s):
1995 ◽
Vol 24
(6)
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pp. 761-766
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2020 ◽
Vol 67
(10)
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pp. 4245-4249
2017 ◽
Vol 27
(13)
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pp. 1606469
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